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Low-Temperature Ion Beam Mixing In Metals, S J. Kim, M A. Nicolet, R S. Averback, David Peak

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A systematic study of ion-beam mixing of tracer impurities in thin metal films at low temperatures has been conducted. We have investigated the dependence of ion mixing on two matrix properties: atomic mass and cohesive energy. We have also studied the dependence of ion mixing on tracer impurity properties: its heat of mixing with the matrix and its thermal diffusivity in the matrix. The matrices investigated were thin films of C, Al, Ti, Fe, Ni, Cu, Mo, Ru, Ag, Hf, Ta, W, Pt, and Au. The tracer impurities, Al, Ti, Cr, Mn, Fe, Ni, Cu, Y, Nb, Mo, Ru, Ag, …