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Rose-Hulman Institute of Technology

Ellipsometry

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Design And Fabrication Of Biaxial Hyperbolic Metamaterials, Changkee Hong May 2020

Design And Fabrication Of Biaxial Hyperbolic Metamaterials, Changkee Hong

Graduate Theses - Physics and Optical Engineering

This thesis describes a new method for fabrication of biaxial hyperbolic metamaterials (BHMMs) using layered structures consisting of oblique angle deposited (OAD) titanium dioxide (TiO2) and copper (Cu). An oblique angle deposition (OAD) technique was utilized to deposit dielectric layer composed of nanocolumnar structures in order to provide biaxial property. The biaxial hyperbolic dispersion of the fabricated BHMM was characterized via profilometer and variable angle spectroscopic ellipsometry (VASE) measurements for wavelength between 381 nm and 894 nm. For the fabricated BHMM, a noticeable difference of 0.13 - 0.001 between the in-plane permittivity components and dual epsilon-near-zero (ENZ) regions which are …