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Study Of Diffusion, Solubility And Electrophysical Properties Of Scandium, Praseodymium And Europium In Silicon, Sirojiddin Z. Zainabidinov, Dilshad E. Nazyrov, Valentina P. Usacheva

Scientific Bulletin. Physical and Mathematical Research

The purpose of the present work was a comprehensive study of the diffusion, solubility and electrophysical properties of scandium (Sc), praseodymium (Pr) and europium (Eu) impurities in silicon. On the surface of the KEP-15 a layer of radioactive isotopes was sprayed: ⁴⁶Sc, ¹⁴³Pr₂O₃, or ¹⁵²Eu₂O₃. The duration of diffusion annealing varied depending on the diffusion temperature of 5 to 72 hours. Autoradiography, measurements of conductivity and Hall's effect, an isothermal relaxation of capacity and current, a research of diffusion, solubility and electrophysical properties of Sc, Pr and Eu in …