Physics Commons^™

Determining The Refractive Index In The Extreme Ultraviolet Using Kramers-Kronig On Thin-Film Scandium Oxide Transmission Data, David D. Allred, Jacqualine J. Butterfield

Faculty Publications

Whereas the real part of the refractive index is dependent on both transmittance and reflectance, the imaginary part can be determined from transmittance data alone. It is possible to use Kramers-Kronig analysis to calculate the real part if the imaginary part is known over a sufficiently broad range. We show that the delta calculated from reflection and transmission data without taking into account roughness may underestimate the real part of the refractive index of the scandium oxide samples we are studying by up to 40% near 270 eV.