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Extreme-Ultraviolet Polarimeter Utilizing Laser-Generated High-Order Harmonics, Nicole Brimhall, Matthew Turner, Nicholas Herrick, David D. Allred, R. Steven Turley, Michael Ware, Justin Peatross
Extreme-Ultraviolet Polarimeter Utilizing Laser-Generated High-Order Harmonics, Nicole Brimhall, Matthew Turner, Nicholas Herrick, David D. Allred, R. Steven Turley, Michael Ware, Justin Peatross
Faculty Publications
We describe an extreme-ultraviolet (EUV) polarimeter that employs laser-generated high-order harmonics as the light source. The polarimeter is designed to characterize materials and thin films for use with EUV light. Laser high harmonics are highly directional with easily rotatable linear polarization, not typically available with other EUV sources. The harmonics have good wavelength coverage, potentially spanning the entire EUV from a few to a hundred nanometers. Our instrument is configured to measure reflectances from 14 to 30 nm and has ~180 spectral resolution (lambda/delta lambda). The reflection from a sample surface can be measured over a continuous range of incident …