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Full-Text Articles in Physics
Spectroscopic End Point Detection With An Electron Beam Evaporator, Ryan Mcgraw
Spectroscopic End Point Detection With An Electron Beam Evaporator, Ryan Mcgraw
University Honors Theses
Spectroscopic end point detection is a common tool used for measuring slope changes in wavelength intensity. Using algorithms able to apply this concept, coatings will be able to be dynamically measured in real time and stopped at the appropriate level to ensure process uniformity. It is currently applied to reductive processes such as etching, where the surface will start to be eaten away, creating a plasma. When the entire amount of a material on a substrate has been eaten away, the plasma will change color as it is beginning to etch a different material. Using a spectrometer, this point where …
Design, Fabrication, And Characterization Of Multilayer Hyperbolic Metamaterials, James Dilts
Design, Fabrication, And Characterization Of Multilayer Hyperbolic Metamaterials, James Dilts
Graduate Theses - Physics and Optical Engineering
Hyperbolic metamaterials (HMMs) show extreme anisotropy, acting as metals and dielectrics along orthogonal directions. They are designed using the effective medium theory (EMT) and can be fabricated using standard semiconductor processing techniques. Current techniques used to characterize the optical behavior of HMMs have a high complexity or are unable to robustly determine the complex permittivity tensor. We describe the details of a procedure to obtain a very low mean-squared-error (MSE) for extraction of permittivity from hyperbolic metamaterials using spectroscopic ellipsometry. We have verified our procedure by fabricating three different samples of various materials and fill factors designed to have a …