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Microelectromechanical Optical Beam Steering Systems, David M. Burns
Microelectromechanical Optical Beam Steering Systems, David M. Burns
Theses and Dissertations
The development of microelectromechanical systems (MEMS) has matured to the point where the fabrication of micron sized devices is feasible. State of the art MEMS construction processes now support the fabrication of novel optical devices that could not previously be built. This dissertation reports on the development of innovative micro optical devices such as Variable Blaze Gratings (VBGs) using state of the art MEMS construction processes. The principle application of the micro optical devices described in this dissertation is steering optical beams; however other applications such as spectral analysis are identified. Specific optical beam steering systems developed and characterized in …
Modeling And Simulation Of Optical Characteristics Of Microelectromechanical Mirror Arrays, Peter C. Roberts
Modeling And Simulation Of Optical Characteristics Of Microelectromechanical Mirror Arrays, Peter C. Roberts
Theses and Dissertations
MEMS (Micro-Electro-Mechanical Systems) micromirror devices can be used to control the phase of a propagating light wavefront, and in particular to correct aberrations that may be present in the wavefront, due to either atmospheric turbulence or any other type of fixed or time and space varying aberrations. In order to shorten the design cycle of MEMS micromirror devices, computer software is developed to create, from MEMS micromirror device design data, a numerical model of the MEMS device. The model is then used to compute the far field diffraction pattern of a wavefront reflected from the device, and to predict the …
Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene
Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene
Theses and Dissertations
Several micro-opto-electro-mechanical structures were designed using the Multi-User MEMS Process (MUMPS). Specific design techniques were investigated for improving the capabilities of elevating flip up structures. The integration of several flip up microoptical structures into a microoptical system was explored with emphasis on the development of a microinterferometer. The thermal effects on the Modulus of Elasticity were determined by detecting the resonant frequency for a square Flexure Beam Micromirror Device. The resonance of the device was found to match theory to within 0.1 % and the Modulus of Elasticity was found to decrease by 0.041 GPa/K from 290 to 450 K. …