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Full-Text Articles in Physics
Electrical Characterization Of Ion-Implanted 4h-Silicon Carbide, Christian P. Morath
Electrical Characterization Of Ion-Implanted 4h-Silicon Carbide, Christian P. Morath
Theses and Dissertations
Electrical characterization has been performed on ion-implanted p-type 4H-SiC to assess the activation efficiency and implantation-related damage recrystallization with the intention of developing an implantation/annealing scheme. Low doped (Na - Nd = 5x10(exp 15)/cu cm) epitaxial p-type layers grown by MOCVD were implanted with Al or B at doses ranging from 1x10(exp 13) to 1x10(exp 14)/sq cm at room temperature or 500 deg. C. The electrical technique of Temperature Dependent Hall Effect (TDHE) indicated that Al and B act as shallow acceptors 4H-SiC with ionization energies of ^252 and ^285 meV, respectively. The highest activation efficiency for Al and B …
Electrical Characterization Of Intrinsic And Induced Deep Level Defects In Hexagonal Sic, James D. Scofield
Electrical Characterization Of Intrinsic And Induced Deep Level Defects In Hexagonal Sic, James D. Scofield
Theses and Dissertations
Deep level defects in hexagonal SiC were studied using digital deep level transient spectroscopy (DLTS) methods over the temperature range of 100 to 800 deg K. New centers were found in bulk and epitaxial 6H-SiC with ionization energies between 0.38 to 1.3 eV, and levels from 0.2 to 0.856 eV were identified in 4H-SiC epitaxy. Direct correlation between inequivalent lattice sites was identified for energetic pairs associated with both vanadium and ion implanted Mg impurities. Nonradioative carrier capture mechanisms were studied and deep level trapping was found to proceed via lattice relaxation multi-phonon emission, indicating efficient electronic lattice coupling in …