Meteorology Commons^™

Fully Electronic Method Of Measuring Post-Release Gap And Gradient/Residual Stress Of A Mems Cantilever, Andrew Stephen Kovacs

Open Access Dissertations

Smartphones and other wireless devices have become ubiquitous over the past decade, and the RF front-end inside of them has become more complex and disproportionately consumes more power compared to other components. Micro-electromechanical systems (MEMS) have a huge potential to reduce these problems while simultaneously offering superior performance compared to current leading-edge technology. However, MEMS technology has difficulty transitioning from the lab to large-scale manufacturing due to the unpredictability of device lifetime and manufacturability issues. This can be mitigated by investigating how critical material or physical parameters (gap, stress, Young's modulus, material thickness, etc.) vary from manufacturing uncertainties and how …