Applied Mechanics Commons^™

Dynamic Analysis Of Viscoelastic Circular Diaphragm Of A Mems Capacitive Pressure Sensor Using Modified Differential Transformation Method, Dr Olurotimi A. Adeleye, Muritala Yusuf, Oluwaseyi .. Balogun

Karbala International Journal of Modern Science

In this paper, a dynamic analysis of the viscoelastic circular diaphragm of a Micro-Electro-Mechanical System (MEMS) capacitive pressure sensor using the Modified Differential Transformation Method (MDTM) is presented. The MEMS technology has been increasingly used to fabricate sensors and actuators and the MEMS capacitive pressure sensor is emerging in many high-performance applications. The deflection of these sensors diaphragm (plate) depends largely on the material of the diaphragm. In this study, a circular diaphragm of viscoelastic material is modeled using the classical plate theory. The governing differential equation is solved using Modified Differential Transformation Method (MDTM) and the result is validated …