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Electronic Devices and Semiconductor Manufacturing

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Full-Text Articles in VLSI and Circuits, Embedded and Hardware Systems

Wave-Shaped Mask Of Fabricating Nano-Scaled Structure, Fang-Tzu Chuang Aug 2014

Wave-Shaped Mask Of Fabricating Nano-Scaled Structure, Fang-Tzu Chuang

Fang-Tzu Chuang

A wave-shaped mask for fabricating a nano-scale structure is disclosed. The wave-shaped mask comprises an elastomeric transparent substrate having an upper surface and a lower surface, and a light-penetrable thin film layer disposed on the upper surface of the elastomeric transparent substrate. The upper surface of the elastomeric transparent substrate and the light-penetrable thin film layer are in a periodic wave shape, and the lower surface of the elastomeric transparent substrate is in a plate shape.


On The Radiation-Induced Soft Error Performance Of Hardened Sequential Elements In Advanced Bulk Cmos Technologies, Norbert Seifert, Vinod Ambrose, B Gill, Q Shi, R Allmon, Charles H. Recchia, S Mukherjee, N Nassif, J Krause, J Pickholtz, A Balasubramanian Jan 2010

On The Radiation-Induced Soft Error Performance Of Hardened Sequential Elements In Advanced Bulk Cmos Technologies, Norbert Seifert, Vinod Ambrose, B Gill, Q Shi, R Allmon, Charles H. Recchia, S Mukherjee, N Nassif, J Krause, J Pickholtz, A Balasubramanian

Charles H Recchia

No abstract provided.