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Electron Beam Induced Deposition Of Highly Conductive Copper Nanowires From Bulk Liquids, Amjad M. Syam

Theses and Dissertations--Electrical and Computer Engineering

Electron-beam induced deposition (EBID) is a position-controlled technique that can directly fabricate nanometer-sized structures in functional materials. In the standard process, a gaseous precursor delivers the desired substance to the substrate for deposition. However, the material purity from these precursors is typically poor, which often negatively affects the functional properties of the deposit. Recently, bulk liquid precursors have been investigated as promising reactants for high purity deposition without the need for post-processing. In this work, EBID from bulk liquids is shown to yield highly conductive nanowire deposits. Aqueous solutions containing copper sulfate (CuSO₄) and sulfuric acid (H_{2 …}