Engineering Commons^™

Modeling And Design Parameter Optimization To Improve The Sensitivity Of A Bimorph Polysilicon-Based Mems Sensor For Helium Detection, Sulaiman Mohaidat, F. M. Alsaleem

Durham School of Architectural Engineering and Construction: Faculty Publications

Helium is integral in several industries, including nuclear waste management and semiconductors. Thus, developing a sensing method for detecting helium is essential to ensure the proper operation of such facilities. Several approaches can be used for helium detection, including based on the high thermal conductivity of helium, which is several times higher than air. This work utilizes the high thermal conductivity of helium to design and analyze a bimorph MEMS sensor for helium sensing applications. COMSOL Multiphysics software (version 6.2) is used to carry out this investigation. The sensor is constructed from poly-silicon and SiO₂ materials with a trenched …

Dna/Carbon Nanotube Hybrid Structure And Their Translocation Through A Nanochannel, Daniel Christoffel Viljoen

Graduate Theses and Dissertations

DNA sequencing is of major importance as it is used in fields such as species differentiation, personalized medicine and food safety. Currently sequencing by synthesis is the most popular commercial method of sequencing DNA while Oxford nanopore’s protein based nanopores are the only portable commercial method. Current nanopore based devices have three main issues: Spacial resolution, translocation rate versus sensor strength and dealing with the persistence length of ssDNA. This thesis contributes to ongoing research that aims to create a nanochannel with integrated sensor based sequencing device. The project has two main objectives. The first objective is to improve the …

A Mems Planar Fresnel Lens For Cmut Array, Shivani Nilesh Upadhyay

Electronic Theses and Dissertations

This thesis presents a Microelectromechanical Systems (MEMS) planar Fresnel lens for use with a Capacitive Micromachined Ultrasonic Transducer (CMUT) array for high-resolution cardiac diagnostic imaging applications. The research exploited the excellent sound propagation and thermal properties of cross-linked silica aerogel, a nano-porous, nano-networked ultra-light-weight material, to design a planar thinfilm lens that can be easily microfabricated or integrated with a CMUT array. The designed lens, comprised of 32 various width concentric rings, was optimized to operate with a 256 element 6 MHz CMUT array. The 4 µm thick lens was designed to generate a 1.9 mm focal spot at a …

Investigating Mems Devices In Flow Conditions Relevant To Flow-Through Systems., Mohammad Shafquatul Islam

Electronic Theses and Dissertations

Advancements in microscale actuating technologies has substantially expanded the possibilities of interacting with the surrounding environment. Microstructures that deflect in response to mechanical forces are one of the largest application areas of microelectromechanical systems (MEMS). MEMS devices, functioning as sensors, actuators, and support structures, find applications in inertial sensors, pressure sensors, chemical sensors, and robotics, among others. Driven by the critical role of catalytic membrane reactors, this dissertation aims to evaluate enzyme activity on polymeric membranes and explore how fabrication methods from the field of Electrical and Computer Engineering (ECE) can incorporate sensing and actuation into these porous surfaces. Toward …

Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang

Electronic Theses and Dissertations

Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large …

Planar Element Alignment System, Benjamin E. Lavigna, Benny F. Cruz, Samuel Gierhan, Jacob Q. Henriksen

Mechanical Engineering

Precise alignment to the micron level is a necessity for microfluidic/micromechanical devices to function as designed. Because of this, a micro-alignment device was commissioned by Professor Hans Mayer on behalf of the Cal Poly Microfluidics Laboratory. Prototype creation was bounded by a set of requirements including, ability to align PDMS & Silicon wafer halves to ± 10 microns, total process speed of three minutes, and total budget of $3000. Some major design hurdles included an ability to verify alignment, possible non-planar alignment pieces, and an inability to contact any point on the face of the alignment pieces after bonding treatment. …

Modeling The Effects Of Radiation On Microelectromechanical Resonators, David D. Lynes

Theses and Dissertations

As the use of MEMS becomes more prolific in air, space, defense, and power applications, they will be exposed to more extreme radiation environments. This dissertation explores the effects of ionizing and nonionizing radiation on MEMS. AlN-on-Si based piezoelectric bulk acoustic wave resonators were irradiated by gamma-rays and silicon ions while measuring S-parameters in situ. Changes to the resonator and equivalent circuit parameters are extracted. The resonators demonstrated resilience against the effects of radiation-induced charge trapping. However, radiation-induced atomic displacements caused shifts to resonant frequency. From these data, an atomistic model is derived to describe the relationship between radiation type …

Micro-Triboelectric Generator For Zero-Power Shock Detection, Mohammad Alzgool, Mohammad Mousavi, Benyamin Davaji, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

This work shows zero-power shock sensing for the combination of a micro-triboelectric generator and MEMS electrostatic actuator system where the mechanical shock to the generator causes it to produce volt- age, this voltage is used to actuate a Micro-Electro-Mechanical-system (MEMS) switch. For the first time, we present the fabrication process of a Triboelectric-Nano-Generator (TENG) with MEMS technology. The MEMS-TENG has a suspended 1.5mm × 1.5mm plate separated by 2 μm from the substrate. The generator is a triboelectric transducer made of a suspended Al micro-plate above a polyimide (PI) thin layer that is covered by another Al layer in the …

Novel Test Fixture For Characterizing Mems Switch Microcontact Reliability And Performance, Protap Kumar Mahanta

Dissertations (1934 -)

Microelectromechanical systems (MEMS) switch is considered as a better alternative than the conventional solid-state DC and RF switches due to their low contact resistance approximately 1 Ω, near-zero power consumption approximately 0 W, low insertion loss approximately 0.2 dB, and high isolation approximately -30 dB. However, reliability is a great concern for them to be ubiquitously used by the industry for specific applications. Switching dynamics and microcontact surface physics play the critical role in determining their reliability. A simple, quick, and efficient test fixture is required to study the contact surface physics as well as to optimize the switching dynamics.In …

Quantum Dynamics Effects On Amplitude-Frequency Response Of Superharmonic Resonance Of Second-Order Of Electrostatically Actuated Nems Circular Plates, Dumitru Caruntu, Julio S. Beatriz

Mechanical Engineering Faculty Publications and Presentations

This work deals with the effects of Casimir and/or van der Waals forces (quantum dynamics phenomena) on the amplitude-frequency response of the superharmonic resonance of second-order of axisymmetric vibrations of electrostatically actuated nanoelectromechanical systems (NEMS) clamped circular plates. Electrostatic actuation consists of alternating current (AC) voltage of magnitude to produce hardexcitationsandoffrequencynearonefourththenaturalfrequencyoftheclamped circular plate. The intermolecular forces Casimir and van der Waals, damping force, and electrostatic force are the forces acting on the NEMS plate. Six Reduced Order Models (ROMs) with one and up to 6 modes of vibration are used. The ROM with one mode of vibration is solved using …

Surface-Functionalized Chemiresistive Films That Exploit H-Bonding, Cation-Pi, And Metal-Halide Interactions., Prasadanie Karunarathna Adhihetty

Electronic Theses and Dissertations

The development of gas sensors for detection of volatile organic compounds (VOCs) has been of interest in the sensing field for decades. To date, the use of metal nanoparticle-based chemiresistors for trace VOC detection, particularly gold nanoparticle-based sensors, is of great interest due to their high chemical stability, ease of synthesis, unique optical properties, large surface to volume ratio, and high level of conductivity. Much effort has been devoted towards gold monolayer protected clusters (Au MPCs) as chemiresistors to detect harmful VOCs. The present thesis documents the results of our efforts to exploit the advantages of functionalized Au MPCs chemiresistors …

Open-Loop Control Of Electrostatic Levitation Actuators To Enhance The Travel-Range Of Optical Switches, Mohammad Mousavi, Mohammad Alzgool, Daniel Lopez, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

Command shaping is a driving technique for handling the large settling time of the high-Q-MEMS actuators. The strong nonlinearity due to the electrostatic actuation limits the linear operation range in cantilevered or torsional micro-mirrors where command shaping techniques can be applied for positioning. Experimental and simulation results of this research demonstrate the effectiveness of using electrostatic levitation to overcome the actuation nonlinearities and a significant increase in the operation range. The motivation for this research is that applying the nonlinear command shaping causes complexity in command manipulation and requires an accurate knowledge of the nonlinear terms involved in the system …

Surface Acoustic Wave (Saw) Sensors: Physics, Materials, And Applications, Debdyuti Mandal, Sourav Banerjee

Faculty Publications

Surface acoustic waves (SAWs) are the guided waves that propagate along the top surface of a material with wave vectors orthogonal to the normal direction to the surface. Based on these waves, SAW sensors are conceptualized by employing piezoelectric crystals where the guided elastodynamic waves are generated through an electromechanical coupling. Electromechanical coupling in both active and passive modes is achieved by integrating interdigitated electrode transducers (IDT) with the piezoelectric crystals. Innovative meta-designs of the periodic IDTs define the functionality and application of SAW sensors. This review article presents the physics of guided surface acoustic waves and the piezoelectric materials …

Simulation For A Mems-Based Ctrnn Ultra-Low Power Implementation Of Human Activity Recognition, Muhammad Emad-Ud-Din, Mohammad H. Hasan, Roozbeh Jafari, Siavash Pourkamali, Fadi M. Alsaleem

Durham School of Architectural Engineering and Construction: Faculty Publications

This paper presents an energy-efficient classification framework that performs human activity recognition (HAR). Typically, HAR classification tasks require a computational platform that includes a processor and memory along with sensors and their interfaces, all of which consume significant power. The presented framework employs microelectromechanical systems (MEMS) based Continuous Time Recurrent Neural Network (CTRNN) to performHAR tasks very efficiently. In a real physical implementation, we show that the MEMS-CTRNN nodes can perform computing while consuming power on a nano-watts scale compared to the micro-watts state-of-the-art hardware. We also confirm that this huge power reduction doesn’t come at the expense of reduced …

Nonlinear Dynamics Of A Class Of Ring-Based Angular Rate Sensing And Energy Harvesting Systems, Ibrahim F Abdelhamid Gebrel

Electronic Thesis and Dissertation Repository

This research is classified into two broad sections: ring-based MEMS (Micro-electro Mechanical Systems) and macro gyroscopes and novel bi-stable/monostable nonlinear energy harvesting systems. In both cases, models and solution methods are based on ring structural dynamics considering comprehensive nonlinear formulations. The investigation of nonlinear and linear dynamic response behavior of MEMS and macro ring gyroscopes forms the basis of the first study. This class of MEMS/macro ring-based vibratory gyroscopes requires oscillatory nonlinear electrostatic/electromagnetic excitation forces for their operation. The partial differential equations that govern the ring dynamics are reduced to a set of coupled nonlinear ordinary differential equations by assuming …

A Mems Pressure Sensor Using Electrostatic Levitation, Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

Applying electrostatic levitation force to the initially-closed gap-closing electrodes of our micro-electro- mechanical system (MEMS) creates multi actuation mechanisms, and opens a new world to the MEMS applications.

Electrostatic levitation allows us to measure physical quantities, such as air pressure, by exploiting pull-in instability and releasing. The beam starts from a pulled-in position by applying a voltage difference between two gap-closing electrodes. When enough voltage is applied to the side electrodes, the cantilever beam is released. At the release instant, electrostatic forces, restoring force, and surface force are applied to the cantilever. According to the experimental results of this work, …

Feasibility Study Of Radio Frequency Microelectromechanical Filters For Space Operation, Karanvir Singh

Theses and Dissertations

Piezoelectric contour mode resonator technology has the unique advantage of combining low motional resistance with the ability to define multiple frequencies on the same substrate. Contour mode resonators can be mechanically coupled together to form robust band-pass filters for the next generation of GPS satellites with extreme size reduction compared to electrically coupled filters. Piezoelectric zinc oxide (ZnO) contour mode resonators have the potential for monolithic integration with current ZnO transistor further reducing size, power consumption, and cost of filter modules. Barium strontium titanate (BST) contour mode resonators have incredible frequency tunability due to the fundamental nature of the thin …

Development Of Novel Compound Controllers To Reduce Chattering Of Sliding Mode Control, Mehran Rahmani

Theses and Dissertations

The robotics and dynamic systems constantly encountered with disturbances such as micro electro mechanical systems (MEMS) gyroscope under disturbances result in mechanical coupling terms between two axes, friction forces in exoskeleton robot joints, and unmodelled dynamics of robot manipulator. Sliding mode control (SMC) is a robust controller. The main drawback of the sliding mode controller is that it produces high-frequency control signals, which leads to chattering. The research objective is to reduce chattering, improve robustness, and increase trajectory tracking of SMC. In this research, we developed controllers for three different dynamic systems: (i) MEMS, (ii) an Exoskeleton type robot, and …

Mems Directional Acoustic Sensors, Colby Damren

Thinking Matters Symposium

The purpose of my project is to test and verify two Micro-Electro-Mechanical-System (MEMS) microphones. The two MEMS devices are biomimetic microphones that imitate the eardrums of the Ormia Ochracea, a parasitic fly that listens for host crickets to lay their eggs. The MEMS microphones mimic the eardrum spacing of the Ormia Ochracea with a spacing of 1000um. This is roughly twice the opening of the Ormia Ochracea. The microphones will be tested for directionality inside a wooden box. This box will be lined with beveled foam to prevent any echo or outside noise from interfering with the results. These results …

Design, Simulation And Testing Of Biomimetic Directional Acoustic Sensors, Brendan Francis

Thinking Matters Symposium

The Ormia ochracea, a species of parasitic fly, has become the focal point in sound localization research because of its finely tuned hearing abilities. The female of this species uses its super highly directional hearing to pinpoint the call of a host cricket, with hypersensitivity of frequency and phase difference, to reach and dispose of its eggs on the host. The goal of this study was to further the research of a previous Project in Professor Guvench’s group which implemented MEMS (Micro Electro-Mechanical System) technology on a chip to replicate these abilities. In this iteration, however, some commercially available …

Electrostatic Levitation: An Elegant Method To Control Mems Switching Operation, Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

This paper investigates the characteristics of a micro-switch that uses two side electrodes to open a normally closed switch. The side electrodes surround the xed electrode in the well-known gap-closing electrode configuration. The side electrodes can open a closed switch and be tuned to respond appropriately to outside forces. The combined electrode system dramatically improves the control of a standard gap-closing electrode configuration. In conventional switches, a DC voltage above a certain value closes the switch. To re-open the switch, the voltage difference is reduced to peel o the moving electrode. Currently the contact area is carefully designed to avoid …

Autonomous Shock Sensing Using Bi-Stable Triboelectric Generators And Mems Electrostatic Levitation Actuators, Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

This work presents an automatic threshold shock-sensing trigger system that consists of a bi-stable triboelectric transducer and a levitation-based electrostatic mechanism. The bi-stable mechanism is sensitive to mechanical shocks and releases impact energy when the shock is strong enough. A triboelectric generator produces voltage when it receives a mechanical shock. The voltage is proportional to the mechanical shock. When the voltage exceed a certain level, the initially pulled-in Microelectromechanical system (MEMS) switch is opened and can disconnect the current in a safety electronic system. The MEMS switch combines two mechanisms of gap-closing (parallel-plate electrodes) with electrostatic levitation (side electrodes) to …

Exploiting Pull-In/Pull-Out Hysteresis In Electrostatic Mems Sensor Networks To Realize A Novel Sensing Continuous-Time Recurrent Neural Network, Mohammad H. Hasan, Amin Abbasalipour, Hamed Nikfarjam, Siavash Pourkamali, Muhammad Emad-Un-Din, Roozbeh Jafari, Fadi Alsaleem

Durham School of Architectural Engineering and Construction: Faculty Publications

The goal of this paper is to provide a novel computing approach that can be used to reduce the power consumption, size, and cost of wearable electronics. To achieve this goal, the use of microelectromechanical systems (MEMS) sensors for simultaneous sensing and computing is introduced. Specifically, by enabling sensing and computing locally at the MEMS sensor node and utilizing the usually unwanted pull in/out hysteresis, we may eliminate the need for cloud computing and reduce the use of analog-to-digital converters, sampling circuits, and digital processors. As a proof of concept, we show that a simulation model of a network of …

Copper Electrodeposition In Full Wafer Thickness Through-Silicon Vias, Rebecca P. Schmitt

Chemical and Biological Engineering ETDs

Through-silicon vias (TSVs) are a key interconnect technology for advanced packaging of microelectronic devices, and full wafer thickness TSVs are required for certain microelectromechanical systems (MEMS) applications. In this work, electrolytes containing copper sulfate, an acid, chloride, and Tetronic 701 suppressor were implemented for Cu filling of high aspect ratio (10:1), full wafer thickness TSVs. For each electrolyte system, rotating disk electrode voltammetry was used to identify a voltage range for bottom-up Cu filling in the TSVs. Die level feature filling was performed using voltage ramping, which moved active deposition through the vias to yield void-free Cu features. During voltage-controlled …

Machine Learning Augmentation Micro-Sensors For Smart Device Applications, Mohammad H. Hasan

Department of Mechanical and Materials Engineering: Dissertations, Theses, and Student Research

Novel smart technologies such as wearable devices and unconventional robotics have been enabled by advancements in semiconductor technologies, which have miniaturized the sizes of transistors and sensors. These technologies promise great improvements to public health. However, current computational paradigms are ill-suited for use in novel smart technologies as they fail to meet their strict power and size requirements. In this dissertation, we present two bio-inspired colocalized sensing-and-computing schemes performed at the sensor level: continuous-time recurrent neural networks (CTRNNs) and reservoir computers (RCs). These schemes arise from the nonlinear dynamics of micro-electro-mechanical systems (MEMS), which facilitates computing, and the inherent ability …

Feasibility Study Of A Mems Threshold-Pressure Sensor Based On Parametric Resonance: Experimental And Theoretical Investigations, Mark Pallay, Meysam Daeichin, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

A tunable threshold pressure sensor based on para- metric resonance of a microbeam subjected to electrostatic levitation is proposed. Parametric excitation can trigger a large amplitude vibration at twice the natural frequency if the mag- nitude of the driving force is large enough to overcome energy loss mechanisms in the system such as squeeze film damping. This causes a temporarily unstable response with a significant gain in oscillation amplitude over time until it is eventually capped by nonlinearities in the force or material or geometric properties. The instability divides the frequency region into two regions: distinct responses bounded by the …

Modeling And Effects Of Non-Homogeneous Infiltration On Material Properties Of Carbon-Infiltrated Carbon Nanotube Forests, Daniel Owens Snow

Theses and Dissertations

This work investigates the material properties and production parameters of carbon infiltrated carbon nanotube structures (CI-CNT's). The impact of non homogeneous infiltration and the porosity of cross section regions, coupled with changes in designed geometry, in this case beam width, on the density and modulus of elasticity are compared. Three potential geometric models of beam cross section are proposed and evaluated. 3-point bending, SEM images, and numerical optimization are used to assess the validity of each model and the implications they have for future CI-CNT material applications. Carbon capping near exterior beam surfaces is observed and determined to be a …

Fabrication Of Silicon Microneedles For Dermal Interstitial Fluid Extraction In Human Subjects, Caleb A. Berry

Electronic Theses and Dissertations

The goal of this project is to design and develop a fabrication process for silicon microneedle arrays to extract dermal interstitial fluid (ISF) from human skin. ISF is a cell- free, living tissue medium that is known to contain many of the same, clinical biomarkers of general health, stress response and immune status as in blood. However, a significant barrier to adoption of ISF as a diagnostic matrix is the lack of a rapid, minimally invasive method of access and collection for analysis. Microfabricated chips containing arrays of microneedles that can rapidly and painlessly access and collect dermal ISF for …

Towards A High Bias Voltage Mems Filter Using Electrostatic Levitation, Mark Pallay, Ronald Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

Traditional MEMS filters use a comb drive structure that suffers from the pull- in instability, which places a significant limitation on the achievable signal-to- noise ration of the sensor. Because the output signal from a capacitive sensor

is linearly related to the applied voltage, it is desirable to use a capacitive sensor that can withstand large voltages upwards of 100V. However, the pull-in instability causes high voltages to destroy the device and a trade-off between performance and reliability must be made. Electrostatic levitation, which works by pulling electrodes apart instead of together, eliminates the pull-in instability and allows for very …

Microrobots For Wafer Scale Microfactory: Design Fabrication Integration And Control., Ruoshi Zhang

Electronic Theses and Dissertations

Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling …