Engineering Commons^™

Fabrication And Application Of Conducting Polymer Micro- And Nano-Patterns, Anirban Chakraborty

Doctoral Dissertations

Conducting polymers, since their discovery, have attracted significant attention due to their promise of replacing silicon and metals in building devices. They have been shown to have wide applications for biological and chemical sensing as well as for electronic devices. Previous and current efforts have concentrated on building devices of a specific function. When multiple micropatterns of different conducting polymers are fabricated on a common substrate, a versatile microsystem can be envisioned. The existing conducting polymer patterning techniques present some technical challenges of degradation, low throughput, low resolution, depth of field, and residual layer in producing conducting polymer microstructures. To …

An Intermediate-Layer Lithography Method For Producing Metal Micron/Nano Patterns And Conducting Polymer-Based Microdevices, Xinchuan Liu

Doctoral Dissertations

Metals have been widely used in the areas of integration circuit (IC) and microelectromechanical systems (MEMS) fields as materials for gates, contact pads, interconnects, corrosion resistance coatings, rectifying contacts, redundancy memories, heating elements, mechanical parts, magnetic component, etc. due to their good properties, such as high electrical conductivity and good thermal conductivity. Conducting polymers, because of their promising potential to replace silicon and metals in building devices, have attracted great attention in recent decades.

Traditional photolithography methods are often used to pattern metals and conducting polymers. However, it cannot be used to fabricate nano patterns because the minimum feature size …