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Microstructural And Compositional Analysis Of Strontium-Doped Lead Zirconate Titanate Thin Films On Gold-Coated Silicon Substrates, S Sriram, M Bhaskaran, D Rg Mitchell, K T. Short, A Holland, A Mitchell

Australian Institute for Innovative Materials - Papers

This article discusses the results of transmission electron microscopy ~TEM!-based characterization of strontium-doped lead zirconate titanate ~PSZT! thin films. The thin films were deposited by radio frequency magnetron sputtering at 3008C on gold-coated silicon substrates, which used a 15 nm titanium adhesion layer between the 150 nm thick gold film and ~100! silicon. The TEM analysis was carried out using a combination of high-resolution imaging, energy filtered imaging, energy dispersive X-ray ~EDX! analysis, and hollow cone illumination. At the interface between the PSZT films and gold, an amorphous silicon-rich layer ~about 4 nm thick! was observed, with the film composition …