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Full-Text Articles in Engineering
Development Of A Polysilicon Check Microvalve, William C. Hart
Development Of A Polysilicon Check Microvalve, William C. Hart
Journal of the Microelectronic Engineering Conference
Check valves are used frequently within the field of microfluidic MEMS, particularly in micropump applications. Check valves serve to limit the flow of a fluid to one direction through a channel. This project was an attempt to manufacture an efficient check microvalve using polysilicon as the valve cover material. Previous work on a microvalve at RIT has been unsuccessful, as the final KOH etch has attacked the polysilicon, thus removing the valves from the openings in the silicon. It was determined that pinholes in the LPCVD nitride were allowing KOH to penetrate the etch mask and attack the substrate surface …
Mems Based Light Modulator, Shushil Shakya
Mems Based Light Modulator, Shushil Shakya
Journal of the Microelectronic Engineering Conference
This paper presents a simple way to build a MEMS based light modulator. Here Aluminum ribbons are suspended in an air gap. An array of these Al ribbons can be used to act as a light modulator. Alternate Al ribbons are connected to a DC bias of 50V which will curve downwards due to the stress applied and electrostatic attraction. Thus, the light intensity can be modulated to any shade of gray needed or even turn it off completely. Different sizes of light modulators were built using Mentor Graphics and were fabricated in the RIT, SMFL. Final results did not …