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Full-Text Articles in Engineering

A New Hybrid Diffractive Photo-Mask Technology, Jin Won Sung Jan 2005

A New Hybrid Diffractive Photo-Mask Technology, Jin Won Sung

Electronic Theses and Dissertations

In the field of photolithography for micro-chip manufacturing, the photo-mask is used to print desired patterns on a proper photo-resist on wafer. The most common type of photo-mask is binary amplitude mask made an opaque layer of chrome. The principle and potential application of hybrid photo-mask with diffractive phase element and binary amplitude is presented in this dissertation paper from both numerical modeling and experimental research. The first important application is the characterization of aberration in the stepper system using hybrid diffractive photo-mask. By utilizing multiple diffractive illumination conditions, it is possible to characterize Zernike wave front aberration coefficients up …


Optical Wave Propagation In Discrete Waveguide Arrays, Jared Hudock Jan 2005

Optical Wave Propagation In Discrete Waveguide Arrays, Jared Hudock

Electronic Theses and Dissertations

The propagation dynamics of light in optical waveguide arrays is characteristic of that encountered in discrete systems. As a result, it is possible to engineer the diffraction properties of such structures, which leads to the ability to control the flow of light in ways that are impossible in continuous media. In this work, a detailed theoretical investigation of both linear and nonlinear optical wave propagation in one- and two-dimensional waveguide lattices is presented. The ability to completely overcome the effects of discrete diffraction through the mutual trapping of two orthogonally polarized coherent beams interacting in Kerr nonlinear arrays of birefringent …