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Full-Text Articles in Engineering

Engineering Composite Gridlines For Improved Solar Module Reliability, Andre Chavez May 2024

Engineering Composite Gridlines For Improved Solar Module Reliability, Andre Chavez

Electrical and Computer Engineering ETDs

Renewable energy sources, such as solar power, are rapidly expanding worldwide to meet increased energy demands. However, these sources are exposed to challenging environmental stressors, such as extreme wind, heavy snow loads, and hailstorms that can cause irreversible damage to the crystalline semiconductor solar cells. Today, single crystalline silicon solar cells dominate the market, and our work is focused on improving their reliability against environmental stressors. One of the main degradation mechanisms caused by environmental stressors is cell cracks. These microcracks can go virtually undetected and lead to reduced power output from solar modules over time. To solve this engineering …


Evaluation Of Anodes And Modular Membrane-Less Single Cell Reactor Designs For On-Site Hypochlorous Acid Generation, Nelson C. Chime May 2024

Evaluation Of Anodes And Modular Membrane-Less Single Cell Reactor Designs For On-Site Hypochlorous Acid Generation, Nelson C. Chime

Electronic Theses and Dissertations

Ensuring safe drinking water and effective sanitation remains a global priority. The shortages of disinfectants experienced during the COVID-19 pandemic further underscore the importance of reliable disinfection methods. Chlorine-based disinfection is widely used but poses safety hazards and logistical challenges in its traditional production and transportation forms. Alternately, on-site chlorine generation using electrochemical conversion of aqueous sodium chloride offers a promising solution, mitigating these risks and providing a flexible approach to disinfection. This thesis investigates the performance of various anode materials and modular, membrane-less, single-cell reactor designs to optimize on-site chlorine generation. Optimization included minimizing specific electrical consumption for chlorine …


Schaeffler Icvd Coating Machine, Louis Mcgrath Jan 2024

Schaeffler Icvd Coating Machine, Louis Mcgrath

Williams Honors College, Honors Research Projects

Chemical Vapor Deposition (CVD) is mutual technology used to deposit thin film through a gaseous phase by vaporizing the solid materials. This conventional process usually requires high thermal stability of the materials, which is not applicable for most of the polymeric materials. Therefore, a novel process, initiated Chemical Vapor Deposition (iCVD) is developed by introducing the gaseous monument and initiator to form the thin film in-situ. By adjusting the free-radical polymerization in the vapor phase, a variety of thin and uniform polymer films can be achieved. Depending on the chemistry, iCVD has many categories. This report explains the design …


Nano-Patterned Si Structures For Optical Filters And Electro-Mechanical Relays: Fabrication, Characterization, Prospects, And Limitations, Md Ataul Mamun Jan 2024

Nano-Patterned Si Structures For Optical Filters And Electro-Mechanical Relays: Fabrication, Characterization, Prospects, And Limitations, Md Ataul Mamun

Theses and Dissertations

Nanofabrication technology, especially nanopatterning, is a rapidly advancing field that has already resulted in creating novel devices and holds promise for producing even more with unmatched performance. These techniques also allow us to gain insight into physical phenomena at the micro- and nanoscale. The ultimate performance of nanofabricated devices and their compatibility with existing Si-based CMOS technology hinge upon the careful selection of materials and precise design, coordinated with meticulous pattern transfer. In this work, we applied nanopatterning techniques on silicon to create optical filters for the shortwave infrared (SWIR) region and nanoelectromechanical system (NEMS) relay-based logic gates. Additionally, these …


Reinventing Integrated Photonic Devices And Circuits For High Performance Communication And Computing Applications, Venkata Sai Praneeth Karempudi Jan 2024

Reinventing Integrated Photonic Devices And Circuits For High Performance Communication And Computing Applications, Venkata Sai Praneeth Karempudi

Theses and Dissertations--Electrical and Computer Engineering

The long-standing technological pillars for computing systems evolution, namely Moore's law and Von Neumann architecture, are breaking down under the pressure of meeting the capacity and energy efficiency demands of computing and communication architectures that are designed to process modern data-centric applications related to Artificial Intelligence (AI), Big Data, and Internet-of-Things (IoT). In response, both industry and academia have turned to 'more-than-Moore' technologies for realizing hardware architectures for communication and computing. Fortunately, Silicon Photonics (SiPh) has emerged as one highly promising ‘more-than-Moore’ technology. Recent progress has enabled SiPh-based interconnects to outperform traditional electrical interconnects, offering advantages like high bandwidth density, …


Cleaning And Characterization Of Chemical Vapor Deposited Graphene For Nanoelectronic Device Development, Sakib Ishraq Jan 2024

Cleaning And Characterization Of Chemical Vapor Deposited Graphene For Nanoelectronic Device Development, Sakib Ishraq

Graduate Theses, Dissertations, and Problem Reports

Nanoelectronic devices based on graphene are a promising technology that combines the sensitivity and specificity of ion and element recognition with the accuracy and precision of electronics. The detection principle is based on the interaction of the target molecules with the nanodevice surface, which generates a measurable electrical signal. In the current study, graphene and its derivatives, synthesis and fabrication of high quality, good uniformity, and low defects graphene have been investigated as they are critical for high-performance and highly sensitive devices. Among many synthesis methods, chemical vapor deposition (CVD), have been used that needs to be transferred from the …


A Comprehensive Exploration Of Fundamental And Experimental Characteristics Of Nanophotonic Metasurfaces, Nasrin Razmjooei Jan 2024

A Comprehensive Exploration Of Fundamental And Experimental Characteristics Of Nanophotonic Metasurfaces, Nasrin Razmjooei

Electrical Engineering Dissertations

The advent of diffraction gratings with periodic unit cells has led to numerous advancements in theoretical studies and practical applications. Recently, these structures have been recognized as subsets of “meta-surfaces” or “meta-materials”, employing periodically aligned features at the wavelength scale to manipulate electromagnetic wave properties for diverse applications. This manipulation extends to controlling amplitude, phase, spectral distribution, polarization state, and the local mode structure of light across various spectral expressions. A significant characteristic of these metasurfaces is their ability to couple incident light to laterally propagating leaky Bloch modes in the subwavelength regime, resulting in resonance at specific wavelengths known …


Amorphous Boron Carbide-Amorphous Silicon Heterojunction Devices, Vojislav Medic Dec 2023

Amorphous Boron Carbide-Amorphous Silicon Heterojunction Devices, Vojislav Medic

Department of Electrical and Computer Engineering: Dissertations, Theses, and Student Research

This dissertation will show successful development and characterization of amorphous boron carbide-amorphous silicon heterojunction device with potential for neutron detection. The amorphous hydrogenated boron carbide (a-BC:H) has been extensively researched as a semiconductor for neutron voltaic device fabrication. Naturally occurring boron contains 19.8% of boron isotope B10 that has a high absorption cross section of thermal neutrons at lower energies, and boron carbide contains 14.7% of that B10 isotope. Therefore, as a semiconductor compound of boron a-BC:H has the ability to absorb radiation, generate charge carriers, and collect those carriers. Previous work on a-BC:H devices investigated the fabrication …


Design, Fabrication, And Integration Of Robotic Skin Sensors For Human Robot Interaction., Olalekan Olakitan Olowo Dec 2023

Design, Fabrication, And Integration Of Robotic Skin Sensors For Human Robot Interaction., Olalekan Olakitan Olowo

Electronic Theses and Dissertations

Enhancing physical human-robot interaction in modern robotics relies on refining the tactile perception of robot skin sensors. This research focuses on crucial aspects of the development process, including fabrication techniques, miniaturization, and integration for a more efficient collaborative human-robot interface. The fabrication process of robot skin sensors, designed to mimic human skin, is explored both within and outside cleanroom environments. An enhanced technique is presented to increase fabrication yield and create more miniaturized sensor designs with feature sizes in the tens of microns. These sensors function as piezoresistive arrays using organic polymers like PEDOT: PSS as the pressure-sensing medium. Various …


Electrophertic Deposition And Characterization Of Molybdenum Disulfide On Silicon Substrates, Alex J. Young Nov 2023

Electrophertic Deposition And Characterization Of Molybdenum Disulfide On Silicon Substrates, Alex J. Young

LSU Doctoral Dissertations

The electrical characteristics of 2D materials such as high electron mobility and current density are of great interest to various fields from optoelectronics to renewable energy. Researchers have focused their efforts on transition metal dichalcogenides (TMDCs) due to their direct energy band gap. One such TMDC that has garnered much attention is molybdenum disulfide (MoS2). MoS2 has electrical properties comparable to graphene and is a TMDC with characteristics amenable to applications such as solar cells and sensors. Commonly deposited through time-consuming and complex deposition methods such as chemical vapor deposition (CVD), the viability of MoS2 as an electronic material will …


Impact Of Silicon Ion Irradiation On Aluminum Nitride-Transduced Microelectromechanical Resonators, David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim Nov 2023

Impact Of Silicon Ion Irradiation On Aluminum Nitride-Transduced Microelectromechanical Resonators, David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim

Faculty Publications

Microelectromechanical systems (MEMS) resonators use is widespread, from electronic filters and oscillators to physical sensors such as accelerometers and gyroscopes. These devices' ubiquity, small size, and low power consumption make them ideal for use in systems such as CubeSats, micro aerial vehicles, autonomous underwater vehicles, and micro-robots operating in radiation environments. Radiation's interaction with materials manifests as atomic displacement and ionization, resulting in mechanical and electronic property changes, photocurrents, and charge buildup. This study examines silicon (Si) ion irradiation's interaction with piezoelectrically transduced MEMS resonators. Furthermore, the effect of adding a dielectric silicon oxide (SiO2) thin film is …


Molecular Dynamics Study Of Characterization In Metal-Free Friction Materials, Yizhan Zhang Nov 2023

Molecular Dynamics Study Of Characterization In Metal-Free Friction Materials, Yizhan Zhang

Electronic Theses and Dissertations

Metallic friction materials currently used in industry may adversely impact the environment. Substitutions for metals in friction materials, on the other hand, can introduce operational safety issues and other unforeseeable issues such as thermal-mechanical instabilities and insufficient strength. In view of it, this dissertation focuses on developing different kinds of materials from simple structure to complex structure and evaluating the material properties with the assistance of molecular dynamics (MD) tools at the nano scale.

First, the concept of the contacted surfaces in friction at the atomic scale was introduced in order to get accurate understanding of the friction process compared …


Exploring Topological Phonons In Different Length Scales: Microtubules And Acoustic Metamaterials, Ssu-Ying Chen Aug 2023

Exploring Topological Phonons In Different Length Scales: Microtubules And Acoustic Metamaterials, Ssu-Ying Chen

Dissertations

The topological concepts of electronic states have been extended to phononic systems, leading to the prediction of topological phonons in a variety of materials. These phonons play a crucial role in determining material properties such as thermal conductivity, thermoelectricity, superconductivity, and specific heat. The objective of this dissertation is to investigate the role of topological phonons at different length scales.

Firstly, the acoustic resonator properties of tubulin proteins, which form microtubules, will be explored The microtubule has been proposed as an analog of a topological phononic insulator due to its unique properties. One key characteristic of topological materials is the …


Integrating Sensor Development, Risk Assessment, And Community Engagement To Support Environmental Justice In The Rural Community Of El Tiple, Colombia, David Bahamon Pinzon Aug 2023

Integrating Sensor Development, Risk Assessment, And Community Engagement To Support Environmental Justice In The Rural Community Of El Tiple, Colombia, David Bahamon Pinzon

All Dissertations

In Colombia, ethnic communities have traditionally been responsible stewards of natural resources. They recognize the importance of these resources for their livelihood, as well as their ancestral and cultural heritage. El Tiple, a rural Afro-Colombian community, has been affected by the incursion of private corporations that promoted the expansion of sugarcane monocrops in their territory. Since the introduction of the monoculture industry, local freshwater sources have been depleted due to intensive water use for irrigation of the sugarcane crops. Additionally, the intensive usage of agrochemicals has been linked with loss of native flora, damages to family farms, and pollution of …


Spice Modeling Of Biosensing Field-Effect Transistor, Alex Castro Jun 2023

Spice Modeling Of Biosensing Field-Effect Transistor, Alex Castro

Electrical Engineering

This project created a user manual on how to generate an easily configurable and implementable Spice model for Field Effect Transistor (FET) devices created in the Cal Poly clean room. The document contained step by step procedures depicting the proper execution techniques and example results for different experiments required to gather the proper information for these models. This testing methodology was shown for finding the numerous different device parameters of a FET, including the I-V curves, threshold voltage, and subthreshold current values. The manual then described how to transfer this data into a new Spice model to allow for simulation …


Characterization Of Low Power Hfo2 Based Switching Devices For In-Memory Computing, Aseel Zeinati May 2023

Characterization Of Low Power Hfo2 Based Switching Devices For In-Memory Computing, Aseel Zeinati

Theses

Oxide based Resistive Random Access Memory (RRAM) devices are investigated as one of the promising non-volatile memories to be used for in-memory computing that will replace the classical von Neumann architecture and reduce the power consumption. These applications required multilevel cell (MLC) characteristics that can be achieved in RRAM devices. One of the methods to achieve this analog switching behavior is by performing an optimized electrical pulse. The RRAM device structure is basically an insulator between two metals as metal-insulator-metal (MIM) structure. Where one of the primary challenges is to assign an RRAM stack with both low power consumption and …


Piezoelectric And Conductive Polymer Based Flexible Devices Enabling Cardiovascular Health Sensing And Energy Harvesting, Andrew Closson May 2023

Piezoelectric And Conductive Polymer Based Flexible Devices Enabling Cardiovascular Health Sensing And Energy Harvesting, Andrew Closson

Dartmouth College Ph.D Dissertations

Piezoelectric materials show great promise for low-power wearable and implantable sensing, but their rigidity makes it challenging to integrate them with biological tissue. To address this, researchers have started exploring polymer-based functional materials that offer flexibility and are suitable for interfacing with the human body. However, these materials are still in their early stages, and a framework is necessary to illustrate how these materials, in conjunction with novel fabrication techniques and device designs, can enable the development of multi-functional sensing and energy harvesting devices.

This thesis utilizes highly scalable fabrication methods for functional polymers to build and test a flexible …


Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang May 2023

Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang

Electronic Theses and Dissertations

Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large …


Fabrication Of Black Phosphorus Terahertz Photoconductive Antennas, Nathan Tanner Sawyers May 2023

Fabrication Of Black Phosphorus Terahertz Photoconductive Antennas, Nathan Tanner Sawyers

Physics Undergraduate Honors Theses

Terahertz (THz) photoconductive antennas (PCAs) using 40nm thin-film flakes of black phosphorus (BP) and hexagonal boron nitride (hBN) have been shown computationally to be capable of THz emission comparable to those based on GaAs [2]. In this paper, I briefly describe the scientific and practical interest in THz emissions and explain what warrants research into black phosphorus as a photoconductive semiconductor in THz devices. Furthermore, I outline the basic principle of how these antennas work and mention alternative designs produced by other researchers in the past. Finally, I summarize the fabrication process of these antennas, as well as the measurements …


Iii-Nitride Triangular Microcantilevers For Multimodal Sensing Applications, Balaadithya Uppalapati May 2023

Iii-Nitride Triangular Microcantilevers For Multimodal Sensing Applications, Balaadithya Uppalapati

All Dissertations

Micro-electromechanical systems (MEMS)-based sensors have gained significant attention due to their ability to sense, measure, and process various physical, chemical, and biological parameters. The small size of MEMS sensors provides numerous advantages, including low power consumption, high sensitivity, and rapid response time, making them suitable for various applications in healthcare, automotive, aerospace, and consumer electronics.

In the past few years, AlGaN/GaN MEMS devices have been found to offer several advantages over silicon-based MEMS devices. One of the main advantages of AlGaN/GaN MEMS is their high sensitivity to surface stresses and forces due to their high piezoelectric coefficients. This sensitivity allows …


A Study On Asymmetric Perfect Vortex: Fractional Orbital Angular Momentum And Nonlinear Interaction, Kunjian Dai May 2023

A Study On Asymmetric Perfect Vortex: Fractional Orbital Angular Momentum And Nonlinear Interaction, Kunjian Dai

All Dissertations

In this work, the manipulation including generation and detection of the asymmetric perfect vortex (APV) carrying fractional orbital angular momentum (OAM) was demonstrated and discussed. All the manipulation of the modes is in real-time which provides a perfect tool for sensing the dynamic properties of complex media. The OAM-involved nonlinear conversion, specifically the second-harmonic generation (SHG) using the APV and asymmetric Bessel-Gaussian (BG) beams was studied in detail.

The generation and detection of the APV are based on the HOBBIT concept which includes acoustic optical deflector (AOD) and log-polar coordinate transformation optics. The RF signal driving the AOD allows the …


Computational Design Of Fiber-Optic Probes For Biosensing, Suwarna Karna Apr 2023

Computational Design Of Fiber-Optic Probes For Biosensing, Suwarna Karna

Electrical Engineering Theses

This thesis presents a study on the optical characteristics of hollow-core photonic crystal fibers (HC-PCFs) with a band gap cladding structure and their applications in optical fiber sensing. This 800B HC-PCF exhibited excellent optical properties and has a flexible structure, which makes them suitable for a wide range of industrial applications. Finite element simulations and structural optimization designs were conducted using the surface plasmon resonance (SPR) technique to determine the optimal performance parameters of the 800B HC-PCF. The fiber was further modified using the SPR technique to improve its practical detection capabilities. The performance of the modified fiber was observed …


Implementing Commercial Inverse Design Tools For Compact, Phase-Encoded, Plasmonic Digital Logic Devices, Michael Efseaff, Kyle Wynne, Krishna Narayan, Mark C. Harrison Mar 2023

Implementing Commercial Inverse Design Tools For Compact, Phase-Encoded, Plasmonic Digital Logic Devices, Michael Efseaff, Kyle Wynne, Krishna Narayan, Mark C. Harrison

Engineering Faculty Articles and Research

Numerical simulations have become an essential design tool in the field of photonics, especially for nanophotonics. In particular, 3D finite-difference-time-domain (FDTD) simulations are popular for their powerful design capabilities. Increasingly, researchers are developing or using inverse design tools to improve device footprints and performance. These tools often make use of 3D FDTD simulations and the adjoint optimization method. We implement a commercial inverse design tool with these features for several plasmonic devices that push the boundaries of the tool. We design a logic gate with complex design requirements as well as a y-splitter and waveguide crossing. With minimal code changes, …


Synthesis And Application Of Redox-Active Covalent Organic Frameworks In Rechargeable Batteries, Mohammad K. Shehab Jan 2023

Synthesis And Application Of Redox-Active Covalent Organic Frameworks In Rechargeable Batteries, Mohammad K. Shehab

Theses and Dissertations

Synthesis and Application of Redox-Active Covalent Organic Frameworks in Rechargeable Batteries

Mohammad K. Shehab

Department of Chemistry, Virginia Commonwealth University, Richmond, Virginia 23284, United States

Abstract

In recent years, lithium-ion batteries (LIBs) have been considered the dominant energy storage devices for portable electronics and electric vehicles due to their high energy density, low self-discharge rate, and long cycle life. In LIBs, the traditional positive electrodes employed are mainly derived from metal-containing inorganic compounds composed of cobalt, iron, nickel, or manganese (LiCoO2, LiMn2O4, and LiFePO4) coupled with graphite as the negative electrode. Despite …


A Phase Change Memory And Dram Based Framework For Energy-Efficient And High-Speed In-Memory Stochastic Computing, Supreeth Mysore Jan 2023

A Phase Change Memory And Dram Based Framework For Energy-Efficient And High-Speed In-Memory Stochastic Computing, Supreeth Mysore

Theses and Dissertations--Electrical and Computer Engineering

Convolutional Neural Networks (CNNs) have proven to be highly effective in various fields related to Artificial Intelligence (AI) and Machine Learning (ML). However, the significant computational and memory requirements of CNNs make their processing highly compute and memory-intensive. In particular, the multiply-accumulate (MAC) operation, which is a fundamental building block of CNNs, requires enormous arithmetic operations. As the input dataset size increases, the traditional processor-centric von-Neumann computing architecture becomes ill-suited for CNN-based applications. This results in exponentially higher latency and energy costs, making the processing of CNNs highly challenging.

To overcome these challenges, researchers have explored the Processing-In Memory (PIM) …


Carrier Transport Engineering In Wide Bandgap Semiconductors For Photonic And Memory Device Applications, Ravi Teja Velpula Dec 2022

Carrier Transport Engineering In Wide Bandgap Semiconductors For Photonic And Memory Device Applications, Ravi Teja Velpula

Dissertations

Wide bandgap (WBG) semiconductors play a crucial role in the current solid-state lighting technology. The AlGaN compound semiconductor is widely used for ultraviolet (UV) light-emitting diodes (LEDs), however, the efficiency of these LEDs is largely in a single-digit percentage range due to several factors. Until recently, AlInN alloy has been relatively unexplored, though it holds potential for light-emitters operating in the visible and UV regions. In this dissertation, the first axial AlInN core-shell nanowire UV LEDs operating in the UV-A and UV-B regions with an internal quantum efficiency (IQE) of 52% are demonstrated. Moreover, the light extraction efficiency of this …


Wearable Sensors For Plants, Nafize Ishtiaque Hossain Dec 2022

Wearable Sensors For Plants, Nafize Ishtiaque Hossain

Electrical Engineering Theses

This thesis reports PlantFit: a research and development project that is intended to develop wearable sensors for plants. Plants are responsible for providing food, fiber, fuel, and fodder to the society. To overcome the problem of a limited land base, a more efficient farming approach needs to be developed, and thus precision farming is required. Precision farming would entail personalized healthcare in plants. When the plant is under any stress, the productivity declines. Plants release phytohormones, also known as early responders, in response to these stressors. The key crop phytohormones that respond to environmental stresses include salicylic acid (SA), indole-3-acetic …


Using Molecular Dynamics Simulations To Decipher Mechanistic Details Of Biomolecular Processes Of Biology And Biotechnology Oriented Applications, Adithya Polasa Dec 2022

Using Molecular Dynamics Simulations To Decipher Mechanistic Details Of Biomolecular Processes Of Biology And Biotechnology Oriented Applications, Adithya Polasa

Graduate Theses and Dissertations

Researchers in chemistry and biology often utilize computer simulations, in conjunction with experimental data, to model and predict the structures, energies, kinetics, processes, and functions of the systems that are their focus of study, ranging from single molecules to whole viruses. Here, we use molecular dynamics (MD) techniques to gain a deeper understanding of biomolecular processes in biology and biotechnology-oriented applications. Using a mixture of equilibrium and non-equilibrium MD simulations, this work describes the insertion process of YidC at the atomic level. In order to better comprehend the insertion process, several docking models of YidC-Pf3 in the lipid bilayer were …


An Integrated Electronic-Skin Patch For Real-Time And Continuous Monitoring Of A Panel Of Biomarkers Combined With Drug Delivery, Tanzila Noushin Dec 2022

An Integrated Electronic-Skin Patch For Real-Time And Continuous Monitoring Of A Panel Of Biomarkers Combined With Drug Delivery, Tanzila Noushin

Electrical Engineering Theses

Inflammatory biomarkers present in the human body play a vital role in medical field by guiding the clinician in decision-making for many diseases. The levels of these inflammatory biomarkers are associated with the severity and progress of several diseases. Researchers have found that increasing severity of many diseases such as cardiovascular disease, after surgery infection, and adverse clinical outcomes due to infectious diseases, results in the elevation of the level of inflammatory biomarkers in human sweat. Furthermore, the inflammatory cytokines indicate the pathophysiology and prognosis of critically ill SARS‑CoV‑2 patients. In this thesis work, different sensors have been developed for …


Material Characterization And Comparison Of Sol-Gel Deposited And Rf Magnetron Deposited Lead Zirconate Titanate Thin Films, Katherine Lynne Miles Nov 2022

Material Characterization And Comparison Of Sol-Gel Deposited And Rf Magnetron Deposited Lead Zirconate Titanate Thin Films, Katherine Lynne Miles

Mechanical Engineering ETDs

Lead zirconate titanate (PZT) has been a material of interest for sensor, actuator, and transducer applications in microelectromechanical systems (MEMS). This is due to their favorable piezoelectric, pyroelectric and ferroelectric properties. While various methods are available to deposit PZT thin films, radio frequency (RF) magnetron sputtering was selected to provide high quality PZT films with the added capability of batch processing. These sputter deposited PZT films were characterized to determine their internal film stress, Young’s modulus, composition, and structure. After characterization, the sputtered PZT samples were poled using corona poling and direct poling methods. As a means of comparison, commercially …