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Microhollow Cathode Discharge Excimer Lamps, Ahmed El-Habachi

Electrical & Computer Engineering Theses & Dissertations

Microhollow cathode discharges are non-thermal discharges of such small sizes that thermalization of the electrons is prevented. By reducing the diameter of the cathode opening in these discharge geometries to values on the order of 100 $\mu$m we were able to operate discharges in argon and xenon in a direct current mode up to atmospheric pressure. The large concentration of high electrons, in combination with high pressures favors three body processes such as excimer formation. This was confirmed by experiments in xenon and argon where emission of excimer radiation at 172 nm and 130 nm, respectively, was observed when the …