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An Interactive System For The Estimation Of Emissivity Of A Wafer In A Rapid Thermal Processing Chamber, Maurizio Fulco
An Interactive System For The Estimation Of Emissivity Of A Wafer In A Rapid Thermal Processing Chamber, Maurizio Fulco
Theses
Rapid thermal processing (RTP) is a method of thermally processing wafers for the manufacture of integrated circuits. During the thermal processing of wafers, it is essential that the wafer temperature follow a pre-specified temperature trajectory and that the temperature across the wafer be uniform especially at high temperatures. To ensure that the above objectives of RTP temperature control be met at any time during the process, the estimation of some parameters of the process is of fundamental importance in the design of the control system.
This thesis demonstrates the implementation of an interactive software system in which the emissivity of …