Engineering Commons^™

Design And Development Of Microcantilever As A Platform For Moisture Sensing, Qi Chen

Doctoral Dissertations

Ultra-sensitive and selective moisture sensors are needed in various industries for processing control or environmental monitoring. As an outstanding sensor platform, microcantilevers have potential application in moisture detection due to their advantages, such as low-level moisture detection limits, high accuracy, quick response time, high reproducibility, good recovery rate and low in cost. Our research results will lead to the first of its kind for the commercialization of a microcantilever-based moisture sensor used for industrial and household applications. The novelty of the present work is the development of SiO2 and Si cantilevers, which were fabricated using developed processes and modified with …

Bulk Micromachining Of Silicon For Moems Prototype, Sung-Dong Suh

Doctoral Dissertations

In this dissertation, the optical application of silicon micromachining technology was investigated in order to create the three-dimensional microstructures that can be used as the components for the MOEMS prototype. These microstructures were designed and fabricated by utilizing corner compensation techniques and silicon bulk micromachining technologies. The fabricated microstructures are silicon mirror arrays that have a 1250 μm etch depth and through-holes across the OE-MCM substrate that has sixteen-fan-out OCDN on front side and a 1mm thickness.

Guided-wave OCDN on MCMs are designed and fabricated to meet the high-speed clocking requirements of next-generation digital systems through a realization of superior …