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Design And Simulation Of A Mems Long Distance Traveling Micro-Actuator, Younes Elkacimi

Theses

This thesis is primarily concerned with the design, synthesis, modeling, and simulation of a linear micro-actuator that is able to travel relatively long distances upon the application of a bias voltage. The theoretical investigation addresses the functionality of this device in a certain setting given fixed and variable parameters. The objective of this investigation is to lay out a mathematical model, which explains the physics behind the workings of this device. It is not the objective of this investigation to study all the possible different scenarios that would result by changing certain or all the variable parameters, rather to prove …