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Rochester Institute of Technology

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Thickness Measurements Using Prism Coupling, Daniel J. Hahn Jan 1988

Thickness Measurements Using Prism Coupling, Daniel J. Hahn

Journal of the Microelectronic Engineering Conference

A HeNe laser and a 45-90 degree prism with an index of refraction of 1.51 were used to study the prism coupling method of determining the thickness and index of refraction of thin films. This project involved the design and construction of a set-up that allowed for simple adjustment of the incident angle of the light. Based on the available prism, Si02 films were testable.

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Implementation Of A Controllable Process For The Rie Etching Of Si02 At Rit, David Jendresky Jan 1988

Implementation Of A Controllable Process For The Rie Etching Of Si02 At Rit, David Jendresky

Journal of the Microelectronic Engineering Conference

An Electrotech Plasmafab 425 reactor was brought on line to perform reactive ion etching (RIE). Samples of Si02 over Si were etched. Results show 400 angstroms/minute using a combination of freon 23 and oxygen as the etchant with good visual uniformity. A selectivity of 6:1 for Si02:Si was achieved.

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Advanced Mask Making At Rit, David P. Kanen Jan 1988

Advanced Mask Making At Rit, David P. Kanen

Journal of the Microelectronic Engineering Conference

This project involved the definition of the steps necessary to generate a mask or reticle for any of the three exposure tools (te. GCA lox G-line Stepper, Perkin Elmer Scanning Aligners, and Kasper Contact Aligners) used at RIT. Next a working process for creating chrome masks for the Perkin Elmer Scanners was developed. Using the process outlined in this paper 5 micron line widths can be repeatedly obtained.

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Design Of Test Die For Monitoring Manufacturing At Rit, Craig R. Klem Jan 1988

Design Of Test Die For Monitoring Manufacturing At Rit, Craig R. Klem

Journal of the Microelectronic Engineering Conference

This project developed a test chip designed to standardize the testing requirements and characterize bipolar, PMOS and CMOS processes at Rochester Institute of Technology. The comon process monitors were designed to test resistivity, opens and shorts, contact resistance and capacitance. The photolithograPhic monitors were designed to test image resolution and alignment. Process specific discrete devices were designed to test parainetrics and leakage currents. The test chip dies were primarily designed to be inserted onto the mask to eliminate the the need for process monitors on each die and secondly, to periodically monitor the performance of a student run integrated circuit …

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A Design Tool Software Interface, Thomas C. Kucmierz Jan 1988

A Design Tool Software Interface, Thomas C. Kucmierz

Journal of the Microelectronic Engineering Conference

Currently, the Integrated Circuit Editor (ICE), a CAD I.C. design tool used for layouts at RIT, lacks any design rule checking simulation capabilities. This project involved writing a program that would translate the output file from ICE in the CalTech Intermediate Format (CIF) into a format that would be readable by other software tools, such as design rule checking and circuit node extraction programs.

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An Integrated Approach To Positive Resist Development Characterization, Mozafar Maghsoudnia Jan 1988

An Integrated Approach To Positive Resist Development Characterization, Mozafar Maghsoudnia

Journal of the Microelectronic Engineering Conference

This paper investigates Neureuther and co-workers development model of positive novolak-type photoresist systems in aqueous alkaline developers. A measurement system for determining the exposure and development model parameter! is described. The dissolution rates for two developer solutions have been examined and the impact of the developer differences on resist profiles is illustrated. The dissolution rate of resist in metal ion free developer at various temperatures is investigated.

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Time Dependence Of Hot Electron Induced Surface States, Joseph P. Magliocco Jan 1988

Time Dependence Of Hot Electron Induced Surface States, Joseph P. Magliocco

Journal of the Microelectronic Engineering Conference

Hot electron injection was investigated using the HP 4145B SPA to induce Fewler- Nordheim tunneling. High frequency and quasi-static capacitance-voltage (C-V) measurements were taken on p-substrate MOS capacitors in order to generate the distribution of surface states throughout the band gap. The results proved inconclusive with no deformation of the low frequency C-V technique being observed.

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Hiac/Royco Particle Counter Installation, Scott H. Mccracken Jan 1988

Hiac/Royco Particle Counter Installation, Scott H. Mccracken

Journal of the Microelectronic Engineering Conference

A HIAC/ROYCO particle monitoring system is being installed to monitor aerosols in the RIT clean room. The system is controlled by a VAX mainframe computer using a Fortran program to read the data from the counter process It and write it to an output file. This file is used to generate control charts monitoring the particle levels at several locations in the cleanroom workspace.

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Redesign Of An Eight-Bit, Ecl Dac To Facilitate Speed And Functionality Testing Of A Bi-Cmos Process, William A. Mcgee Jan 1988

Redesign Of An Eight-Bit, Ecl Dac To Facilitate Speed And Functionality Testing Of A Bi-Cmos Process, William A. Mcgee

Journal of the Microelectronic Engineering Conference

The redesign and layout of a clocked eight-bit digital to analog converter using emitter coupled logic is examined based on testing of the original circuit, simulation of ground node resistance and pinout compatibility to a produced part. The completed layout is subjectively compared to the original circuit design. Production and evaluation is pending at this time.

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Evaluation Of Plasma Damage To Thin Gate Oxides, Patricia A. Ostling Jan 1988

Evaluation Of Plasma Damage To Thin Gate Oxides, Patricia A. Ostling

Journal of the Microelectronic Engineering Conference

Capacitance-Voltage (C-V) arid Conductance-Voltage (G-V) measurements were performed to characterize field induced charges in thin (300A) oxides subjected to a RF generated oxygen plasma used to remove photoresist. Results based on C-V curves indicate a -4.6V threshold voltage shift for capacitors exposed to the RF plasma as compared to capacitors without plasma processing. Results based on tunnel current measurements were inconclusive.

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Wedax Studies On The Hitachi S.E.M., Ronald L. Quiett Jr Jan 1988

Wedax Studies On The Hitachi S.E.M., Ronald L. Quiett Jr

Journal of the Microelectronic Engineering Conference

The WEDAX (Wavelength Dispersive Analysis of X-rays) system incorporated Into the Hitachi S.E.M. is a method of performing chemical microanalysis of a material. The primary objective of this project was to bring up the system to full operating status and calibrate the WEDAX utilizing known samples of aluminum, copper, and silicon. As of May 1988, the S.E.M. resolution Is at 2K and the WEDAX Is still inoperable.

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Evaluation Of Integrated Injection Logic Devices At Rit, Carl J. Romano Jan 1988

Evaluation Of Integrated Injection Logic Devices At Rit, Carl J. Romano

Journal of the Microelectronic Engineering Conference

IlL logic gates were fabricated using a two diffusion, four mask process. The functioning of NOR and OR gates were evaluated, and suggestions for improving the process are given.

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Hall Measurements In Semiconductors, Tony Scelsi Jan 1988

Hall Measurements In Semiconductors, Tony Scelsi

Journal of the Microelectronic Engineering Conference

An experiment to compare resistivity and carrier concentration results for p-type silicon using four point probe and Hall measurements is described. The effects of current magnitude and magnetic field magnitude on the results obtained using Hall measurements were also investigated. The Hall data and four point probe data was In close agreement for both carrier concentration and resistivity for specified ranges of current and magnetic field.

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Superconductor Test Station, William F. Schofield Ii Jan 1988

Superconductor Test Station, William F. Schofield Ii

Journal of the Microelectronic Engineering Conference

A basic test station, using a modified four point probe was designed and built for measuring resistivity over a temperature range. This test station can now be used to characterize the effects of any subsequent semiconductor processing on transition temperatures and performance of superconductive films.

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The Use Of A Contrast Enhancement Layer To Extend The Practical Resolution Limits Of Optical Lithographic Systems, Daniel R. Sutton Jan 1988

The Use Of A Contrast Enhancement Layer To Extend The Practical Resolution Limits Of Optical Lithographic Systems, Daniel R. Sutton

Journal of the Microelectronic Engineering Conference

Resolution capability of a GCA Mann 4800 DSW Stepper was improved using a bilayer photoresist scheme consisting of CEM-420 applied on Shipley 1400-27 resist. Wall profile or contrast Improvements were observed experimentally on a 1.4 micron line-space pattern by using the Scanning Electron Microscope. Perkin-Elmer Development Rate Moniter (DRM) simulations predicted the above improvements by the use of the PROSIM software applications program. The physical data and simulations were evaluated and demonstrated a contrast Improvement on the order of four times for the wafer with the contrast enhancement material.

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Pmos Operational Amplifier, Khanh-Binh Ta Jan 1988

Pmos Operational Amplifier, Khanh-Binh Ta

Journal of the Microelectronic Engineering Conference

This project was an evaluation of a PMOS op amp characteristics. Due to nonworking op amps, SPICE simulation and design layout were investigated. Results show that new design and fabrication are needed.

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Setup And Performance Testing Of Autosort Mark Ii Flatness Analysis System, Jeff Waite Jan 1988

Setup And Performance Testing Of Autosort Mark Ii Flatness Analysis System, Jeff Waite

Journal of the Microelectronic Engineering Conference

An Autosort Mark II wafer flatness tester was installed and initial runs and performance testing accomplished. A guide for aiding in every day use of the machine was written as well as a fortran program that performs a statistical analysis on performance data.

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Design, Construction, And Qualification Of A Chlorinated Oxide Growth Process, Steven D. Ward Jan 1988

Design, Construction, And Qualification Of A Chlorinated Oxide Growth Process, Steven D. Ward

Journal of the Microelectronic Engineering Conference

This project dealt with the design and installation of a TCA bubbler system. Considerations for safety and temperature control of the TCA were simplified by the use of a J.C. Schumacher Flow Temperature Control unit. Installation of the system is complete and chlorinated oxides have been grown.

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Optimizing Tone Production On A 300 Spot Per Inch Laser Printer, James R. Hamilton Jan 1988

Optimizing Tone Production On A 300 Spot Per Inch Laser Printer, James R. Hamilton

Theses

Digital halftones as output on plain paper are the focus of this study. A new terminology is suggested to allow proper description of digital halftones. The most important of these terms is the use of "addressability" to replace the often misused term "resolution." Also important is the use of the term "spot" rather than "dot" to describe addressability. A means of properly describing digital halftones is suggested to avoid confusion with analog (ie., conventional photographic) halftones. Halftone patterns were created to test the efficiency of different designs at 300 spot per inch addressability on a laser printer. The page description …

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Developing A Procedure To Reduce Thermal Shock Influence In A Steam Turbine Due To Cold Start, Ching-Po Liu Jan 1988

Developing A Procedure To Reduce Thermal Shock Influence In A Steam Turbine Due To Cold Start, Ching-Po Liu

Theses

An improved procedure is developed to reduce the thermal shock influence in a steam turbine due to a cold start operation. Thermal shock, a term used to describe the sudden imposition of a large heat flux and temperature gradient on a material surface, is a potential damage mechanism if its intensity is sufficiently high. For the case of a turbine cold start, the thermal shock intensity depends on the film coefficient and the initial temperature difference between the steam and the rotor surface. Reduction of thermal shock intensity can be achieved in several ways, such as lengthening the transit time. …

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Photographic Work 1986-87, Peter Ainsworth Carter Jan 1988

Photographic Work 1986-87, Peter Ainsworth Carter

Theses

Not listed.

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An Experimental Characterization Of The Tensile Behavior Of Polystyrene, Louis T. Loggi Jan 1988

An Experimental Characterization Of The Tensile Behavior Of Polystyrene, Louis T. Loggi

Theses

The characterization of polymeric materials involves many different tests which often depend upon the ultimate environment for the end product. One important area for many engineering applications is that of mechanical testing. Although the evaluation of tensile properties ranks as the most common mechanical test, standard test methods can have serious shortcomings when applied to plastics. This work seeks to study test method variability by evaluating experimental data from uni -axial tension tests conducted on a typical high-impact polystyrene at room temperature. Two common methods will be used to obtain the strain data: extensometer transducer and foil strain gage. These …

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Cview, A Graphical Program Generator For The C Programming Language, Walter E. Martin Jan 1988

Cview, A Graphical Program Generator For The C Programming Language, Walter E. Martin

Theses

The electronics industry has long been a user of graphical design aids. Graphical design tools for VLSI circuits are used to lay out the design, generate data structures for the simulation of the circuit and eventually produce the photomasks for the production of the chip. As such these tools form a working environment that allows an engineer to design, debug and produce a final product. Software design, in general, is still done by writing individual lines of code. At best a macro language or a meta-language will be available to ease the pain of detail coding. While these tools are …

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A User Interface Management System For Voice I/O Applications, Brian A. Nadworny Jan 1988

A User Interface Management System For Voice I/O Applications, Brian A. Nadworny

Theses

With the use of voice technology increasing, a need for proper end-user interfacing is necessary. To deal with voice I/O applications, a user interface management system (UIMS) is suggested. This will alleviate the frustrations of poorly designed interfacing. It will also remove the burden from the systems designer of implementing the end-user interface and allow him/her to concentrate on the application. The end-user interface will then be designed by an expert in dialogue design with the assistance from the UIMS. This thesis presents a UIMS model to be used with voice applications.

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The Relationship Between Computer Interaction And Individual User Characteristics, Kathleen Lambert Jan 1988

The Relationship Between Computer Interaction And Individual User Characteristics, Kathleen Lambert

Theses

Development of effective human computer interaction is being approached independently by two disciplines -- user interface design and computer aided instruction. The lack of communication between the two fields has left each separately pursuing different paths toward the same goals. This thesis attempts to bridge the gap between these two disciplines. An exploratory study was conducted to analyze whether user choices in a computer aided instruction environment and personality types as defined by the Myers-Briggs type indicator are related strongly enough to provide the basis for future user models. The results demonstrated that no single instructional strategy was preferred, implying …

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The Controlled Shutdown Of A Hydraulic Servo-System Using Acceleration Feedback, Mark Jolly Jan 1988

The Controlled Shutdown Of A Hydraulic Servo-System Using Acceleration Feedback, Mark Jolly

Theses

Hydraulic servoactuators have long been used in industry where high performance precision motion control is required. Because of their precision and ability to generate large forces, applications are numerous in industry. One such application provides cockpit motion for flight simulation. This thesis investigates a new emergency shutdown (abort) scheme for such high performance servo-systems. Because flight simulation involves the motion control of both man and machinery (a mock cockpit in motion), it will be used as the standard by which a safe and effective abort is modeled. The justification for motion abort during actuator operation is unsafe actuator accelerations. In …

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1988-1989 Ntid Courses, Rochester Institute Of Technology Jan 1988

1988-1989 Ntid Courses, Rochester Institute Of Technology

RIT Digital Archives

No abstract provided.

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1988-1989 Undergraduate Course Descriptions, Rochester Institute Of Technology Jan 1988

1988-1989 Undergraduate Course Descriptions, Rochester Institute Of Technology

RIT Digital Archives

No abstract provided.

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Computer Aided Design Of Multiple Pulley Timing Belt Drives, Gary Matson Jan 1988

Computer Aided Design Of Multiple Pulley Timing Belt Drives, Gary Matson

Theses

The design of timing belt drive systems involves determining the belt width and belt length. The length of the belt is a geometry problem which requires summing the tangent lines and the arcs comprising the pitch line. The width of the belt is determined by the required loads. A computer program is developed in this project to automate the timing belt design process. The program comes in three versions. Each version chooses a target belt length, moves a specified pulley to achieve that length, then calculates the minimum belt width. The three versions of the program are the batch version, …

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An 8085 Microprocessor Based Monitor System For A 750 Cc Honda Motorcycle, Robert H. Leet Jan 1988

An 8085 Microprocessor Based Monitor System For A 750 Cc Honda Motorcycle, Robert H. Leet

Theses

This system replaces the analog speedometer and tachometer gauge cluster of a 750 cc Honda motorcycle with a computerized monitor system based on the INTEL 8085A microprocessor and family of peripherals. The system adds the enhanced functionality of engine temperature, battery charging, fuel level, turn signal, and kick stand monitoring and status display. A security function is also employed as a guard against unauthorized use or theft. The speedometer and tachometer functions utilize phototransistor sensors generating pulses derived from stock cable connections to the engine block and front wheel. The engine temperature, fuel level, and battery charging functions are implemented …

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