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Effects Of Interface Scattering And Carrier Localization On Conductance Of Cu-Based Superlattices, Jiyoon Jessica Kim
Effects Of Interface Scattering And Carrier Localization On Conductance Of Cu-Based Superlattices, Jiyoon Jessica Kim
Legacy Theses & Dissertations (2009 - 2024)
Ultra-thin films and multilayer structures are widely used in modern technologies such as semiconductor logic and memory devices. As film thickness decreases to a few nanometers or smaller, classical transport theories are no longer valid. In this study, we investigate transport properties of superlattices with layer thickness reduced to ~1 nm. The superlattices are made of alternating layers of Cu and a transition metal (Ru, Mo, and Co). The layers are deposited by physical vapor deposition and resistance changes during superlattice growth are measured. The observed resistance evolution reveals the effects of carrier scattering and localization at the interfaces.