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Elucidating Fundamental Mechanisms In Focused Electron- And Ion-Beam Induced Synthesis, Carlos M. Gonzalez

Doctoral Dissertations

A focused electron beam deposition process (FEBID) coupled with in-situ infrared pulsed laser assist (LA-EBID) has been implemented for higher purity tungsten nanowires using W(CO)₆ [tungsten hexacarbonyl] as parent precursor gas. Nanowires made of Co from Co₂(CO)₈ [dicobalt octacarbonyl] and Pt from MeCpPtIVMe₃ [trimethyl methylcyclopentadienyl platinum] have also been realized by using inert focused ion beams of helium and helium and neon, respectively. In all cases, higher electrical conductivities, higher purities and larger grain sizes have been obtained when compared with preceding traditional additive edit techniques. These new approaches will make possible successful nanoscale direct-write …