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Electrostatic Discharge Properties Of Fused Silica Coatings, Allen Andersen, Charles Sim, Jr Dennison

Allen Andersen

The electric field value at which electrostatic discharge (ESD) occurs was studied for thin coatings of fused silica (highly disordered SiO2/SiOx) on conductive substrates, such as those encountered as optical coatings and in Si microfabrication. The electrostatic breakdown field was determined using an increasing voltage, while monitoring the leakage current. A simple parallel-plate capacitor geometry was used, under medium vacuum and at temperatures down to ~150 K using a liquid N2 reservoir. The breakdown field, pre-breakdown arcing and I-V curves for fused silica samples are compared for ~60 nm and ~80 μm thick, room and low temperature, and untreated and …