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Evanescent Wave Coupling Using Different Subwavelength Gratings For A Mems Accelerometer, Al-Aakhir A. Rogers
Evanescent Wave Coupling Using Different Subwavelength Gratings For A Mems Accelerometer, Al-Aakhir A. Rogers
USF Tampa Graduate Theses and Dissertations
A novel technique of coupling near-field evanescent waves by means of variable period subwavelength gratings (1.2 ìm and 1.0 ìm), using a 1.55 ìm infrared semiconductor laser is presented for the use of an optical MEMS accelerometer. The subwavelength gratings were fabricated on both glass and silicon substrates respectively.
Optical simulation of the subwavelength gratings was carried out to obtain the maximum coupling efficiency of the two subwavelength gratings; the grating thickness, grating width, and the grating separation were optimized. This was performed for both silicon and glass substrates.
The simulations were used to determine the total system noise, including …