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Modeling And Simulation Of Optical Characteristics Of Microelectromechanical Mirror Arrays, Peter C. Roberts
Modeling And Simulation Of Optical Characteristics Of Microelectromechanical Mirror Arrays, Peter C. Roberts
Theses and Dissertations
MEMS (Micro-Electro-Mechanical Systems) micromirror devices can be used to control the phase of a propagating light wavefront, and in particular to correct aberrations that may be present in the wavefront, due to either atmospheric turbulence or any other type of fixed or time and space varying aberrations. In order to shorten the design cycle of MEMS micromirror devices, computer software is developed to create, from MEMS micromirror device design data, a numerical model of the MEMS device. The model is then used to compute the far field diffraction pattern of a wavefront reflected from the device, and to predict the …
Demonstrating Optical Aberration Correction With A Mems Micro-Mirror Device, Shaun R. Hick
Demonstrating Optical Aberration Correction With A Mems Micro-Mirror Device, Shaun R. Hick
Theses and Dissertations
This research conducted the first demonstrated use of a micro-electro-mechanical structure (MEMS) mirror array to correct a static optical aberration. A well-developed technique in adaptive optics imaging systems uses a deformable mirror to reflect the incident wave front to the imaging stage of the system. By matching the surface of the deformable mirror to the shape of the wave front phase distortion, the reflected wave front will be less aberrated before it is imaged. Typical adaptive optics systems use piezo-electric actuated deformable mirrors. This research used an electrostatically actuated, segmented mirror array, constructed by standard MEMS fabrication techniques, to investigate …