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Non-Contact Measurement For Thermal Conductivity Of Diamond-Like And Hard Carbon Thin Films, Ganming Qin

Theses

In this research work, non-contact temperature measurement was applied to determine the thermal conductivity of diamond-like and hard carbon thin films. Dielectric materials widely used as thin films in device manufacturing are SiO₂, Si₃N₄, polymer, and etc. However, their heat dissipating capacity is not good for power devices. It is necessary to develop a new material for this purpose. Diamond crystal is a high quality dielectric material. It has the highest room-temperature thermal conductivity [k=20W (cm · K) at 20°C] among all materials. In addition, it has high electrical resistivity ( >10¹⁶ Ω …