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Cryogenic Rf Test Of The First Srf Cavity Etched In An Rf Ar/Cl2 Plasma, J. Upadhyay, A. Palczewski, S. Popovic, A.-M. Valente-Feliciano, Do Im, H. L. Phillips, L. Vuskovic

Physics Faculty Publications

An apparatus and a method for etching of the inner surfaces of superconducting radio frequency (SRF) accelerator cavities are described. The apparatus is based on the reactive ion etching performed in an Ar/Cl₂ cylindrical capacitive discharge with reversed asymmetry. To test the effect of the plasma etching on the cavity rf performance, a 1497 MHz single cell SRF cavity was used. The single cell cavity was mechanically polished and buffer chemically etched and then rf tested at cryogenic temperatures to provide a baseline characterization. The cavity's inner wall was then exposed to the capacitive discharge in a mixture of …