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Impurity-Concentration Profile For An Exponentially Decaying Diffusion Coefficient In Irradiation Enhanced Diffusion, J Kowall, David Peak, J W. Corbett

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The diffusion equation is solved for a semi-infinite region in the case of irradiation-enhanced diffusion produced by a diffusion coefficient falling off exponentially in the medium. Near the surface the concentration profile due to enhanced diffusion has a larger concentration than the profile due to thermal diffusion; conversely far from the surface the enhanced-diffusion profile has a lower concentration than that due to thermal diffusion. Thus, this type of enhanced diffusion results in a more abruptly changing profile than does thermal diffusion.