Physics Commons^™

High-Temperature Optical Properties Of Indium Tin Oxide Thin-Films, Jiwoong Kim, Sujan Shrestha, Maryam Souri, John G. Connell, Sungkyun Park, Ambrose Seo

Physics and Astronomy Faculty Publications

Indium tin oxide (ITO) is one of the most widely used transparent conductors in optoelectronic device applications. We investigated the optical properties of ITO thin films at high temperatures up to 800 °C using spectroscopic ellipsometry. As temperature increases, amorphous ITO thin films undergo a phase transition at ~ 200 °C and develop polycrystalline phases with increased optical gap energies. The optical gap energies of both polycrystalline and epitaxial ITO thin films decrease with increasing temperature due to electron-phonon interactions. Depending on the background oxygen partial pressure, however, we observed that the optical gap energies exhibit reversible changes, implying that …