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Plasma Emission Redistribution In A Single Cylce Of A Pulsed Dc Magnetron, W. Zhu, G. Buyle, J. Lopez, S. Shanmugmurthy, A. Belkind, K. Becker, R. De Gryse

Physics Faculty Publications

Time-resolved images of the optical emissions from a pulsed dc titanium target planar rectangular sputtering magnetron plasma were taken using Argon spectral filters and a Roper Scientific ICCD camera with a time resolution of 0.05-0.2 μs. At the beginning of the 'on-time', when the power is turned on, the discharge initially starts preferentially in two opposite curved sections ('cross corners') of the magnetron race track, where it exhibits the most intense plasma emissions. During the rest of the 'on-time', the emissions from the straight sections of the race track of the magnetron are always slightly more intense than the emissions …