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Intermetallic Reactions In Vacuum-Deposited Nickel And Gold Films On (111) Silicon Single Crystals, K. H. Yoon, Gordon Lewis, L. L. Levenson
Intermetallic Reactions In Vacuum-Deposited Nickel And Gold Films On (111) Silicon Single Crystals, K. H. Yoon, Gordon Lewis, L. L. Levenson
Materials Science and Engineering Faculty Research & Creative Works
Pure nickel and gold thin films were vacuum-deposited on (111) silicon single crystals. When Ni/Au/Si or Au/Ni/Si samples were heated to about 550° in situ, hexagonal or deformed hexagonal shaped crystallites were formed on the silicon substrates. The composition of these crystallites was determined by using x-ray diffraction, scanning electron microscopy and scanning Auger microprobe methods. The crystallites were identified as NiSi2. The crystal-lites on the (111) silicon plane parallel to the surface appeared as regular hexagons while the inclined crystal-lites resembled trapezia. The results of Auger spectra and in-depth composition profiles for Ni, Au, and Si showed that the …