Physics Commons^™

Nanoscale Characterization Of Thin Film Coatings Using Annular Dark Field Scanning Transmission Electron Microscopy, Guillermo Acosta, Richard Vanfleet, David D. Allred

Faculty Publications

When considering the optical performance of thin films in the Extreme Ultraviolet (EUV), developing an accurate physical description of a thin film coating is necessary to be able to successfully model optical performance. With the short wavelengths of the EUV, film interfaces and sample roughness warrant special attention and care. The surfaces of thin film samples are routinely measured by Atomic Force Microscopy, from which roughness can be determined. However, characterizing the quality of interfaces below the surface is much more challenging. In a recent study of scandium oxide thin films, High Resolution Transmission Electron Microscopy and Annular Dark Field …