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Cathodoluminescence Of Irradiated Hafnium Dioxide, Emily A. Purcell

Theses and Dissertations

The purpose of this research is to understand the effect of radiation on HfO₂ thin films, and to compare the quality of HfO₂ thin films produced by both atomic layer deposition (ALD) and pulsed laser deposition (PLD); PLD samples had varying substrate temperatures during deposition (300°C, 500°C, and 750°C). The entirety of this research was conducted using cathodoluminescence (CL) as the examination method. The excitation source was a Kimball Physics EMG-12 electron gun. The photomultiplier tube contained a gallium arsenide photocathode. Measurements were made with beam energies ranging from 1 to 10 keV and beam currents ranging from …