Physics Commons^™

Silicon Optical Fiber Pressure Sensor, Jian Pan

Theses

A novel optical fiber pressure sensor based on a micromachined thin silicon diaphragm is proposed. Detail descriptions of the sensor structure, modulation principle and fabrication process are given.

The device operates on the following principle: Pressure deflects a silicon diaphragm which moves the output end of a light source fiber. The emitted light intensity is picked up and shared by two receiving fibers placed side by side. The variation of the intensity ratio in the receiving fibers caused by the relative motion of the emitting fiber can be easily converted to a linear signal versus the deflection of the silicon …