Physics Commons^™

Electron Beam Induced Luminescence Of Sio2 Optical Coatings, Jr Dennison, Amberly Evans, Gregory Wilson, Justin Dekany, Charles Bowers, Robert Meloy

Justin Dekany

Optical coatings of disordered thin film SiO2/SiOx dielectric samples on reflective metal substrates exhibited cathodoluminescence under electron beam irradiation. Measurements of the absolute radiance and emission spectra as functions of incident electron energy, flux and power over a range of sample temperatures are reported. Radiance reached a saturation plateau at high incident electron power. Well below saturation radiance scaled with deposited power, that is linearly with incident power for lower-energy non-penetrating electrons and decreasing with increasing energy for penetrating radiation. Four bands were observed in spectral measurements from 300 nm to 1000 nm. Changes in peak intensity and shifts in …