Physics Commons^™

Improvement Of Atomic Layer Deposition Techniques Of Tungsten Using Hydrogen As A Reducing Agent, Jason Kyle Anderson, Dr. David Allred

Journal of Undergraduate Research

Introduction: Traditional micro fabrication processes are confined to a small subset of possible materials due to limitations on etching. They are also confined to low aspect ratio fabrication due to limits in both etching process and stability of thicker film deposition processes. Carbon Nanotube Templated Microfabrication (CNT-M) technology has introduced a dramatically different approach to micro fabrication that fabricates without significant etching processes and achieves thick features with the equivalent of thin depositions. This is achieved by forming the desired structure in carbon nanotubes and then filling, or infiltrating, that structure with the material of choice. Optimal materials infiltration for …