Physics Commons^™

Growth Control Of Oxygen Stoichiometry In Homoepitaxial Srtio3 Films By Pulsed Laser Epitaxy In High Vacuum, Ho Nyung Lee, Sung S. Ambrose Seo, Woo Seok Choi, Christopher M. Rouleau

Physics and Astronomy Faculty Publications

In many transition metal oxides, oxygen stoichiometry is one of the most critical parameters that plays a key role in determining the structural, physical, optical, and electrochemical properties of the material. However, controlling the growth to obtain high quality single crystal films having the right oxygen stoichiometry, especially in a high vacuum environment, has been viewed as a challenge. In this work, we show that, through proper control of the plume kinetic energy, stoichiometric crystalline films can be synthesized without generating oxygen defects even in high vacuum. We use a model homoepitaxial system of SrTiO₃ (STO) thin films on …