Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 2 of 2
Full-Text Articles in Physics
Stress Evolution In Nanocrystalline Diamond Films Produced By Chemical Vapor Deposition, Hao Li, Brian W. Sheldon, Abhishek Kothari, Zhigang Ban, Barbara L. Walden
Stress Evolution In Nanocrystalline Diamond Films Produced By Chemical Vapor Deposition, Hao Li, Brian W. Sheldon, Abhishek Kothari, Zhigang Ban, Barbara L. Walden
Faculty Scholarship
Nanocrystalline diamond films were grown on silicon substrates by microwave plasma enhanced chemical vapor deposition with 1% methane, 2%–10% hydrogen, and argon. High resolution transmission electron microscope images and selected area electron diffraction patterns confirm that the films consist of 10–20 nm sized diamond grains. The residual and intrinsic stresses were investigated using wafer curvature. Intrinsic stresses were always tensile, with higher H2 concentrations generally leading to higher stresses. Annealing the films in a hydrogen plasma significantly increased these stresses. These hydrogen induced changes also appear to alter stress levels and stress gradients during the growth process itself. Raman …
Chemistry-Induced Intrinsic Stress Variations During The Chemical Vapor Deposition Of Polycrystalline Diamond, Ashok Rajamani, Brian W. Sheldon, Sumit Nijhawan, Alan Schwartzman, Janet Rankin, Barbara L. Walden, Laura Riester
Chemistry-Induced Intrinsic Stress Variations During The Chemical Vapor Deposition Of Polycrystalline Diamond, Ashok Rajamani, Brian W. Sheldon, Sumit Nijhawan, Alan Schwartzman, Janet Rankin, Barbara L. Walden, Laura Riester
Faculty Scholarship
Intrinsic tensile stresses in polycrystalline films are often attributed to the coalescence of neighboring grains during the early stages of film growth, where the energy decrease associated with converting two free surfaces into a grain boundary provides the driving force for creating tensile stress. Several recent models have analyzed this energy trade off to establish relationships between the stress and the surface∕interfacial energy driving force, the elastic properties of the film, and the grain size. To investigate these predictions, experiments were conducted with diamond films produced by chemical vapor deposition. A multistep processing procedure was used to produce films with …