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Simple Versatile Shearing Interferometer Suitable For Measurements On A Microscopic Scale, Emilia Mihaylova, Vincent Toal

Articles

Microelectromechanical systems (MEMS) behave differently from massive samples. Conventional testing and inspection techniques usually fail at the microscale. Recently there has been an increasing interest in the application of optical techniques for microstructure testing, because they are high-resolution, non-contact, full-field, fast and relatively inexpensive. New interferometric systems, which are suitable for microscopic optical metrology, are of interest for engineering and industrial applications. A modified electronic speckle pattern shearing interferometer (ESPSI) with a very simple shearing device has been designed for metrology applications on the microscale. The shearing device consists of two partially reflective glass plates. The reflection coefficients of the …