Physics Commons^™

Kinetic Modeling Of Roll To Roll Rfcvd Plasma, Kudzo S. Ahegbebu, Siva Sashank Tholeti, Alina A. Alexeenko

The Summer Undergraduate Research Fellowship (SURF) Symposium

Roll-to-roll radio frequency plasma enhanced chemical vapor deposition (R2R RFCVD) is a technique for large-scale synthesis of high quality graphitic nanopetals. Graphitic nanopetals are petal-like graphene structures with remarkable electrical and mechanical properties with major industrial applications such as microsupercapacitors. RFCVD uses a non-equilibrium plasma with high energy electrons to catalyze chemical reactions, induce the creation of free radicals, and promote otherwise high temperature chemistry in a low temperature environment. Understanding how bulk plasma characteristics (particularly, power and number densities) vary with changing reactor parameters is an important step towards optimizing synthesis techniques. In our present work we use the …