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Dsmc Simulation Of Microstructure Actuation By Knudsen Thermal Force, Aaron Pikus, Israel Sebastiao, Andrew Strongrich, Alina Alexeenko

The Summer Undergraduate Research Fellowship (SURF) Symposium

In many industrial and research applications there is a need for vacuum sensors with higher accuracy and spatial resolution than what is currently available. Examples of target applications include high-altitude platforms, satellites and in-vacuum manufacturing processes such as freeze-drying of food and pharmaceuticals. In this connection, a novel pressure sensor, named Microelectromechanical In-plane Knudsen Radiometric Actuator (MIKRA), has been developed by at Purdue University. MIKRA is based on Knudsen thermal forces generated by rarefied flow driven by thermal gradients within the microstructure Thus, the goal of this work is to model the rarefied gas flow in the MIKRA sensor under …