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Fitting Als Reflectance Data Using Python, R. Steven Turley
Fitting Als Reflectance Data Using Python, R. Steven Turley
Faculty Publications
This article describes how to use the python refl library in https://bitbucket.org/steve_turley/reflectance-fitting to fit thin film reflectance data from the Advanced Light Source (ALS) at Lawrence Berkeley National Labs. It uses data taken for a thin film of aluminum capped by a thin film of aluminum fluoride on a silicon nitride substrate. The single fit in the example shown here shows the importance of taking into account the oxidation of the aluminum layer as part of the fit.