Open Access. Powered by Scholars. Published by Universities.®
- Discipline
Articles 1 - 2 of 2
Full-Text Articles in Physics
Y2O3 Optical Constants Between 5 Nm And 50 Nm, Joseph B. Muhlestein, Benjamin D. Smith, Margaret Miles, Stephanie M. Thomas, Anthony Willey, David D. Allred, R. Steven Turley
Y2O3 Optical Constants Between 5 Nm And 50 Nm, Joseph B. Muhlestein, Benjamin D. Smith, Margaret Miles, Stephanie M. Thomas, Anthony Willey, David D. Allred, R. Steven Turley
Faculty Publications
We report optical constants of e-beam evaporated yttrium oxide Y2O3 thin films as determined from angle-dependent reflectance measurements at wavelengths from 5 to 50 nm. Samples were measured using synchrotron radiation at the Advanced Light Source. The experimental reflectance data were fit to obtain values for the index of refraction and thin film roughness. We compare our computed constants with those of previous researchers and those computed using the independent atom approximation from the CXRO website. We found that the index of refraction near 36 nm is much lower than previous data from Tomiki as reported by …
Effective Medium Theory, Rough Surfaces, And Moth’S Eyes, David D. Allred, Zephne Larsen, Joseph Muhlestein, R. Steven Turley, Anthony Willey
Effective Medium Theory, Rough Surfaces, And Moth’S Eyes, David D. Allred, Zephne Larsen, Joseph Muhlestein, R. Steven Turley, Anthony Willey
Faculty Publications
Optics in the extreme ultraviolet (XUV) have important applications in microelectronics, microscopy, space physics, and in imaging plasmas. Because of the short wavelengths involved in these applications, it is critical to account for interfacial roughness to accurately predict the reflection and absorption of XUV optics. This paper examines two possible effects of roughness on optical absorption, non-specular reflection and enhanced transmission and compares these to measured experimental data on a rough Y2O3 thin film.