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Modeling And Design Of High Force Rfmems Contact Switches, Joseph Eid Estefanous Zekry
Modeling And Design Of High Force Rfmems Contact Switches, Joseph Eid Estefanous Zekry
Archived Theses and Dissertations
This thesis describes the modeling and design issues of high force electrostatically actuated RFMEMS contact switches. Various reliability issues and challenges are associated with the design of RFMEMS contact switches. The reliability of microcontacts is of major importance in increasing the lifetime of such devices. A semi-analytical model based on the beam deflection theory is developed to calculate the contact force delivered by parallel-plate electrostatically actuated switch structures. The model is capable of fast and accurate static solution for complicated switch structures which are normally analyzed using finite element analysis techniques. High force designs are presented together with finite element …