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Cathodoluminescence Of Irradiated Hafnium Dioxide, Emily A. Purcell
Cathodoluminescence Of Irradiated Hafnium Dioxide, Emily A. Purcell
Theses and Dissertations
The purpose of this research is to understand the effect of radiation on HfO2 thin films, and to compare the quality of HfO2 thin films produced by both atomic layer deposition (ALD) and pulsed laser deposition (PLD); PLD samples had varying substrate temperatures during deposition (300°C, 500°C, and 750°C). The entirety of this research was conducted using cathodoluminescence (CL) as the examination method. The excitation source was a Kimball Physics EMG-12 electron gun. The photomultiplier tube contained a gallium arsenide photocathode. Measurements were made with beam energies ranging from 1 to 10 keV and beam currents ranging from …