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Argon Metastable And Resonant Level Densities In Ar And Ar/Cl² Discharges Used For The Processing Of Bulk Niobium, Jeremy Peshl, Roderick Mcneill, Charles I. Sukenik, Milka Nikolić, Svetozar Popović, Leposava Vŭsković
Argon Metastable And Resonant Level Densities In Ar And Ar/Cl² Discharges Used For The Processing Of Bulk Niobium, Jeremy Peshl, Roderick Mcneill, Charles I. Sukenik, Milka Nikolić, Svetozar Popović, Leposava Vŭsković
Physics Faculty Publications
A comparative analysis of two popular spectroscopy techniques is conducted in a coaxial cylindrical capacitively coupled discharge designed for the plasma processing of superconducting radio frequency (SRF) cavities. The density of the metastable and resonant levels in Ar is measured in both Ar and Ar/Cl2 discharges to properly characterize the unique discharge system and aid in the development of a cavity etching routine. The first method, deemed the “branching fraction method,” utilizes the sensitivity of photon reabsorption of radiative decay to measure the lower state (metastable and resonant) densities by taking ratios of spectral lines with a common upper …