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Decomposition Of Carbon Dioxide In A Capacitively Coupled Radio Frequency Discharge, Thao Hoang Dinh

Physics Theses & Dissertations

Decomposition of CO₂ was studied in a capacitively coupled radio frequency discharge using Martian Simulant Gas mixture that contains 95% CO₂. The discharge was operated at a gas pressure of 3 to 6 Torr and a discharge power density of less than 2.0 W/cm³. The main mechanism of the CO₂ decomposition process is the electron impact dissociation and the rate of the process depends on the electron density, Ne, the concentration of CO₂, and the reduced electric field, E/N. A self-consistent model was established to describe the CO …